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High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si 3 N 4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m −1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications. Integrated photonic all-waveguide resonators are a critical component in many future applications. Here the authors develop an optimized photonic all-waveguide resonator with an ultra-high quality factor, Q, of almost half a billion, and a narrow sub-MHz linewidth.

Spectrally pure lasers, the heart of precision high-end scientific and commercial applications, are poised to make the leap from the laboratory to integrated circuits. Translating this performance to integrated photonics will dramatically reduce cost and footprint for applications such as ultrahigh capacity fibre and data centre networks, atomic clocks and sensing. Despite the numerous applications, integrated lasers currently suffer from large linewidth. Brillouin lasers, with their unique properties, offer an intriguing solution, yet bringing their performance to integrated platforms has remained elusive. Here, we demonstrate a sub-hertz (~0.7 Hz) fundamental linewidth Brillouin laser in an integrated Si3N4 waveguide platform that translates advantages of non-integrated designs to the chip scale. This silicon-foundry-compatible design supports low loss from 405 to 2,350 nm and can be integrated with other components. Single- and multiple-frequency output operation provides a versatile low phase-noise solution. We highlight this by demonstrating an optical gyroscope and a low-phase-noise photonic oscillator.

The scaling of many photonic quantum information processing systems is ultimately limited by the flux of quantum light throughout an integrated photonic circuit. Source brightness and waveguide loss set basic limits on the on-chip photon flux. While substantial progress has been made, separately, towards ultra-low loss chip-scale photonic circuits and high brightness single-photon sources, integration of these technologies has remained elusive. Here, we report the integration of a quantum emitter single-photon source with a wafer-scale, ultra-low loss silicon nitride photonic circuit. We demonstrate triggered and pure single-photon emission into a Si 3 N 4 photonic circuit with ≈ 1 dB/m propagation loss at a wavelength of ≈ 930 nm. We also observe resonance fluorescence in the strong drive regime, showing promise towards coherent control of quantum emitters. These results are a step forward towards scaled chip-integrated photonic quantum information systems in which storing, time-demultiplexing or buffering of deterministically generated single-photons is critical. Applications of ultra-low-loss photonic circuitry in quantum photonics, in particular including triggered single photon sources, are rare. Here, the authors show how InAs quantum dot single photon sources can be integrated onto wafer-scale, CMOS compatible ultra-low loss silicon nitride photonic circuits.

The generation of ultra-low-noise microwave and mmWave in miniaturized, chip-based platforms can transform communication, radar and sensing systems 1–3 . Optical frequency division that leverages optical references and optical frequency combs has emerged as a powerful technique to generate microwaves with superior spectral purity than any other approaches 4–7 . Here we demonstrate a miniaturized optical frequency division system that can potentially transfer the approach to a complementary metal-oxide-semiconductor-compatible integrated photonic platform. Phase stability is provided by a large mode volume, planar-waveguide-based optical reference coil cavity 8,9 and is divided down from optical to mmWave frequency by using soliton microcombs generated in a waveguide-coupled microresonator 10–12 . Besides achieving record-low phase noise for integrated photonic mmWave oscillators, these devices can be heterogeneously integrated with semiconductor lasers, amplifiers and photodiodes, holding the potential of large-volume, low-cost manufacturing for fundamental and mass-market applications 13 .

Narrow linewidth visible light lasers are critical for atomic, molecular and optical (AMO) physics including atomic clocks, quantum computing, atomic and molecular spectroscopy, and sensing. Stimulated Brillouin scattering (SBS) is a promising approach to realize highly coherent on-chip visible light laser emission. Here we report demonstration of a visible light photonic integrated Brillouin laser, with emission at 674 nm, a 14.7 mW optical threshold, corresponding to a threshold density of 4.92 mW μm −2 , and a 269 Hz linewidth. Significant advances in visible light silicon nitride/silica all-waveguide resonators are achieved to overcome barriers to SBS in the visible, including 1 dB/meter waveguide losses, 55.4 million quality factor (Q), and measurement of the 25.110 GHz Stokes frequency shift and 290 MHz gain bandwidth. This advancement in integrated ultra-narrow linewidth visible wavelength SBS lasers opens the door to compact quantum and atomic systems and implementation of increasingly complex AMO based physics and experiments. In this work the authors demonstrate on-chip integration of Brillouin lasing operating at visible wavelengths, with engineered design for stable output. This technical and scientific advance will help develop integrated light sources for quantum computing or atomic and molecular spectroscopy.

Heterogeneous and monolithic integration of the versatile low-loss silicon nitride platform with low-temperature materials such as silicon electronics and photonics, III–V compound semiconductors, lithium niobate, organics, and glasses has been inhibited by the need for high-temperature annealing as well as the need for different process flows for thin and thick waveguides. New techniques are needed to maintain the state-of-the-art losses, nonlinear properties, and CMOS-compatible processes while enabling this next generation of 3D silicon nitride integration. We report a significant advance in silicon nitride integrated photonics, demonstrating the lowest losses to date for an anneal-free process at a maximum temperature 250 °C, with the same deuterated silane based fabrication flow, for nitride and oxide, for an order of magnitude range in nitride thickness without requiring stress mitigation or polishing. We report record low anneal-free losses for both nitride core and oxide cladding, enabling 1.77 dB m-1 loss and 14.9 million Q for 80 nm nitride core waveguides, more than half an order magnitude lower loss than previously reported sub 300 °C process. For 800 nm-thick nitride, we achieve as good as 8.66 dB m−1 loss and 4.03 million Q, the highest reported Q for a low temperature processed resonator with equivalent device area, with a median of loss and Q of 13.9 dB m−1 and 2.59 million each respectively. We demonstrate laser stabilization with over 4 orders of magnitude frequency noise reduction using a thin nitride reference cavity, and using a thick nitride micro-resonator we demonstrate OPO, over two octave supercontinuum generation, and four-wave mixing and parametric gain with the lowest reported optical parametric oscillation threshold per unit resonator length. These results represent a significant step towards a uniform ultra-low loss silicon nitride homogeneous and heterogeneous platform for both thin and thick waveguides capable of linear and nonlinear photonic circuits and integration with low-temperature materials and processes.We demonstrate for the first time, a uniform low temperature (<250 °C) process for fabricating both high-confinement thick and low-confinement thin ultra-low loss Silicon nitride waveguides.

Today’s precision experiments for timekeeping, inertial sensing, and fundamental science place strict requirements on the spectral distribution of laser frequency noise. Rubidium-based experiments utilize table-top 780 nm laser systems for high-performance clocks, gravity sensors, and quantum gates. Wafer-scale integration of these lasers is critical for enabling systems-on-chip. Despite progress towards chip-scale 780 nm ultra-narrow linewidth lasers, achieving sub-Hz fundamental linewidth and sub-kHz integral linewidth has remained elusive. Here we report a hybrid integrated 780 nm self-injection locked laser with 0.74 Hz fundamental and 864 Hz integral linewidths and thermorefractive-noise-limited 100 Hz 2 /Hz at 10 kHz. These linewidths are over an order of magnitude lower than previous photonic-integrated 780 nm implementations. The laser consists of a Fabry-Pérot diode edge-coupled to an on-chip splitter and a tunable 90 million Q resonator realized in the CMOS foundry-compatible silicon nitride platform. We achieve 2 mW output power, 36 dB side mode suppression ratio, and a 2.5 GHz mode-hop-free tuning range. To demonstrate the potential for quantum atomic applications, we analyze the laser noise influence on sensitivity limits for atomic clocks, quantum gates, and atom interferometer gravimeters. This technology can be translated to other atomic wavelengths, enabling compact, ultra-low noise lasers for quantum sensing, computing, and metrology.

Precision applications including quantum computing and sensing, mmWave/RF generation, and metrology, demand widely tunable, ultra-low phase noise lasers. Today, these experiments employ table-scale systems with bulk-optics and isolators to achieve requisite noise, stability, and tunability. Photonic integration will enable scalable, reliable and portable solutions. Here we report a hybrid-integrated external cavity widely tunable laser stabilized to a 10 m-long integrated coil-resonator, achieving record-low 3 – 7 Hz fundamental linewidth across a 60 nm tuning range and 27 – 60 Hz integral linewidth with 1.8E-13 ADEV at 6.4 ms across 40 nm, delivering orders of magnitude frequency noise and integral linewidth reduction over state of the art. Stabilization is achieved without an optical isolator, leveraging resilience to optical feedback of 30 dB beyond that of commercial DFB lasers. The laser and reference cavity are fabricated in the same Si3N4 CMOS-compatible process, unlocking a path towards fully integrated visible to ShortWave-IR frequency-stabilized lasers. Frequency stabilized lasers are critical to precision applications including quantum, metrology, and sensing. A photonic integrated widely tunable external cavity laser and platform compatible coil resonator reference provide ultra-low linewidth and frequency noise over a record wide tuning range.

Narrow linewidth stabilized lasers are central to precision applications that operate across the visible to short-wave infrared wavelengths, including optical clocks, quantum sensing and computing, ultra-low noise microwave generation, and fiber sensing. Today, these spectrally pure sources are realized using multiple external cavity tabletop lasers locked to bulk-optic free-space reference cavities. Integration of this technology will enable portable precision applications with improved reliability and robustness. Here, we report wavelength-flexible design and operation, over more than an octave span, of an integrated coil-resonator-stabilized Brillouin laser architecture. Leveraging a versatile two-stage noise reduction approach, we achieve low linewidths and high stability with chip-scale laser designs based on the ultra-low-loss, CMOS-compatible silicon nitride platform. We report operation at 674 and 698 nm for applications to strontium neutral and trapped-ion clocks, quantum sensing and computing, and at 1550 nm for applications to fiber sensing and ultra-low phase noise microwave generation. Over this range we demonstrate frequency noise reduction from 1 to 10 MHz resulting in 1.0–17 Hz fundamental and 181–630 Hz integral linewidths and an Allan deviation of 6.5 × 10 −13 at 1 ms for 674 nm, 6.0 × 10 −13 at 15 ms for 698 nm, and 2.6 × 10 −13 at 15 ms for 1550 nm. This work demonstrates the lowest fundamental and integral linewidths and highest stability achieved to date for stabilized Brillouin lasers with integrated coil-resonator references, with over an order of magnitude improvement in the visible wavelength range. These results unlock the potential of integrated, ultra-low-phase-noise stabilized lasers for precision applications and further integration in systems-on-chip solutions.

A chip-based optical frequency comb source has now been successfully used to send 661 Tbit s–1 over 9.6 km of multicore fibre, bringing considerable savings in the energy consumption and size of data transmission equipment.