Explore the vast range of titles available.

This paper presents a fully addressable 8 × 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer, resulting in a low-cost solution for ultrasound imaging. A polyimide layer is used as the passive layer in the PMUT membranes on top of the active piezoelectric layer. The PMUT membranes are realized by backside deep reactive ion etching (DRIE) with an oxide etch stop. The polyimide passive layer enables high resonance frequencies that can be easily tuned by controlling the thickness of the polyimide. The fabricated PMUT with 6 µm polyimide thickness showed a 3.2 MHz in-air frequency with a 3 nm/V sensitivity. The PMUT has shown an effective coupling coefficient of 14% as calculated from the impedance analysis. An approximately 1% interelement crosstalk between the PMUT elements in one array is observed, which is at least a five-fold reduction compared to the state of the art. A pressure response of 40 Pa/V at 5 mm was measured underwater using a hydrophone while exciting a single PMUT element. A single-pulse response captured using the hydrophone suggested a 70% −6 dB fractional bandwidth for the 1.7 MHz center frequency. The demonstrated results have the potential to enable imaging and sensing applications in shallow-depth regions, subject to some optimization.

With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.

This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

Due to a sedentary lifestyle, the amount of people suffering from musculoskeletal back diseases has increased over the last few decades. To monitor and cure these disabilities, sensors able to monitor the patient for long-term measurement during daily life and able to provide real-time feedback are required. There are only a few wearable systems that are capable to acquire muscle activity (sEMG) and posture at the same time. Moreover, previously reported systems do not target back sensor and typically comprise bulky uncomfortable solutions. In this paper, we present a new wearable sensor network that is designed to measure muscle activity and posture specialized for back measurement. Special care was taken to propose a discrete and comfortable solution. The prototype only measures 3.1 mm in thickness on the spine, making this sensor system the thinnest and lightest one in the literature to our best knowledge. After testing, it was shown that the sensor system is able to acquire two surface electromyography signals concurrently, to gather acceleration and rotation speed from the patient’s lower back, and to transmit data to a computer or a smartphone via serial communication or Bluetooth low energy for a few hours for later processing and analysis.

How dynamic activity in neural circuits gives rise to behavior is a major area of interest in neuroscience. A key experimental approach for addressing this question involves measuring extracellular neuronal activity in awake, behaving animals. Recently developed Neuropixels probes have provided a step change in recording neural activity in large tissue volumes with high spatiotemporal resolution. This protocol describes the chronic implantation of Neuropixels probes in mice and rats using compact and reusable 3D-printed fixtures. The fixtures facilitate stable chronic in vivo recordings in freely behaving rats and mice. They consist of two parts: a covered main body and a skull connector. Single-, dual- and movable-probe fixture variants are available. After completing an experiment, probes are safely recovered for reimplantation by a dedicated retrieval mechanism. Fixture assembly and surgical implantation typically take 4–5 h, and probe retrieval takes ~30 min, followed by 12 h of incubation in probe cleaning agent. The duration of data acquisition depends on the type of behavioral experiment. Since our protocol enables stable, chronic recordings over weeks, it enables longitudinal large-scale single-unit data to be routinely obtained in a cost-efficient manner, which will facilitate many studies in systems neuroscience. This protocol describes the implantation of Neuropixels probes for chronic recording of neural activity in rats and mice using 3D-printed fixtures. The fixtures enable routine probe reuse, and single-, dual- and movable-probe variants are described.

The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration. Meanwhile, advancements in fabrication techniques have led to the emergence of micromachined alternatives, namely, piezoelectric micromachined ultrasound transducer (PMUT) and capacitive micromachined ultrasound transducer (CMUT). These devices operate in flexural mode using piezoelectric thin films and electrostatic forces, respectively. In addition, the development of flexible ultrasound transducers based on these principles has opened up new possibilities for biomedical applications, including biomedical imaging, sensing, and stimulation. This review provides a detailed discussion of the need for flexible micromachined ultrasound transducers (MUTs) and potential applications, their specifications, materials, fabrication, and electronics integration. Specifically, the review covers fabrication approaches and compares the performance specifications of flexible PMUTs and CMUTs, including resonance frequency, sensitivity, flexibility, and other relevant factors. Finally, the review concludes with an outlook on the challenges and opportunities associated with the realization of efficient MUTs with high performance and flexibility.

Grafting has become a common practice for watermelon [ Citrullus lanatus (Thunb.) Matsum & Nakai] production in many parts of the world, due to its efficacy against biotic and abiotic stressors. However, grafting success for watermelon is challenging in part due to the complex anatomy of the cucurbit vascular system. The survival of grafted transplants depends on compatibility between the scion and rootstock, which in turn depends on anatomical, physiological, and genetic variables. A better understanding of cucurbit anatomy and graft union formation would inform grafting approaches and transplant management. An anatomical study was conducted by scanning electron microscopy (SEM) at 11 and 25 days after grafting (DAG) with seedless watermelon cultivar ‘Secretariat’ grafted onto compatible rootstock cultivars ‘Pelop’ ( Lagenaria siceraria ) and ‘Tetsukabuto’ ( Cucurbita maxima × Cucurbita moschata ) in comparison to non-grafted watermelon and rootstock seedlings. At 11 DAG, the parenchymatic cells of the central pith of grafted plants were dead and a necrotic layer was observed, representing the beginning of callus formation. New xylem strands were formed in the vascular system, connecting the rootstock with the scion. At 25 DAG, fully developed vascular bundles at the graft interface were observed with both scion-rootstock combinations. Although more studies are necessary to characterize the sequence of physiological events after grafting in Cucurbit species, this is one of the first studies to describe the complex anatomical changes that occur during watermelon graft healing.

In microfluidics, flow focusing is widely used to produce water-in-oil droplets in microchannels at high frequency. We here report an experimental study of droplet formation in a microfluidic cross-junction with a minimum number of geometrical parameters. We mostly focus on the squeezing regime, which is composed of two distinct steps: filling and pinching. The duration of each step (and corresponding volumes of each liquid phase) is analyzed. They vary according to both water and oil flow rates. These variations provide several insights about the fluid flows in both phases. We propose several scaling laws to relate the droplet volume and frequency to the flow rate of both phases. We also discuss the influence of surfactant and channel compliance on droplet formation.

Pre-shaped microbeams, curved or inclined, are widely used in MEMS for their interesting stiffness properties. These mechanisms allow a wide range of positive and negative stiffness tuning in their direction of motion. A mechanism of pre-shaped beams with opposite curvature, connected in a parallel configuration, can be electrothermally tuned to reach a near-zero or negative stiffness behavior at the as-fabricated position. The simple structure helps incorporate the tunable spring mechanism in different designs for accelerometers, even with different transduction technologies. The sensitivity of the accelerometer can be considerably increased or tuned for different applications by electrothermally changing the stiffness of the spring mechanism. Opposite inclined beams are implemented in a capacitive micromachined accelerometer. The measurements on fabricated prototypes showed more than 55 times gain in sensitivity compared to their initial sensitivity. The experiments showed promising results in enhancing the resolution of acceleration sensing and the potential to reach unprecedent performance in micromachined accelerometers.

This paper presents the design and fabrication process of a spherical-omnidirectional ultrasound transducer for underwater sensor network applications. The transducer is based on the vibration of two hemispheres with a thickness of 1 mm and an outer diameter of 10 mm, which are actuated by two piezoelectric ring elements. Since the ultrasound wave is generated by the vibration of the two hemispheres, a matching layer is not required. Silicon Carbide (SiC) is used as the material of the hemispherical shells of the transducer. The shells were fabricated by laser sintering as an additive manufacturing method, in which the hemispheres were built layer by layer from a powder bed. All manufactured transducers with an outer dimension of 10 × 14.2 mm and a center frequency of 155 kHz were measured in a water tank by a hydrophone or in mutual communication. The circumferential source level was measured to vary less than 5dB. The power consumption and the insertion loss of the transducer, ranging from 100 μ W to 2.4 mW and 21.2 dB, respectively, along with all other measurements, prove that the transducer can transmit and receive ultrasound waves omnidirectionally at tens of centimeters intervals with a decent power consumption and low actuation voltage.