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The paper will describe all the details about Rutherford Backscattering Spectrometry (RBS) Technique. The well-collimated beam of energetic particles is shot into a high-vacuum scattering chamber containing the target. The energy of the backscattered ions is then measured from scattering events occurring at both the surface and a particular depth. The typical backscattering angles used are optimised for mass resolution at 160° ≤ θ ≤ 170°.