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Fundamental principles of optical lithography
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
eBook
Start making! : a guide to engaging young people in Maker activities
\"Start Making! is a program developed by the Clubhouse Network to engage young people all over the world in Maker-inspired activities. With this guide, you will discover how to plan and coordinate Start Making! projects in your home, school, library, community center, after-school club, or Makerspace. You'll learn strategies for engaging young people in creative thinking, developing individual and team projects, and sharing and reflecting on their creations\"--Back cover.
Book
Tunnel field-effect transistors (TFET) : modelling and simulation
Research into Tunneling Field Effect Transistors (TFETs) has developed significantly in recent times, indicating their significance in low power integrated circuits. This book describes the qualitative and quantitative fundamental concepts of TFET functioning, the essential components of the problem of modelling the TFET, and outlines the most commonly used mathematical approaches for the same in a lucid language.
Divided into eight chapters, the topics covered include: Quantum Mechanics, Basics of Tunneling, The Tunnel FET, Drain current modelling of Tunnel FET: The task and its challenges, Modeling the Surface Potential in TFETs, Modelling the Drain Current, and Device simulation using Technology Computer Aided Design (TCAD). The information is well organized, describing different phenomena in the TFETs using simple and logical explanations.
Key features:
* Enables readers to understand the basic concepts of TFET functioning and modelling in order to read, understand, and critically analyse current research on the topic with ease.
*Includes state-of-the-art work on TFETs, attempting to cover all the recent research articles published on the subject.
* Discusses the basic physics behind tunneling, as well as the device physics of the TFETs.
* Provides detailed discussion on device simulations along with device physics so as to enable researchers to carry forward their study on TFETs.
Primarily targeted at new and practicing researchers and post graduate students, the book would particularly be useful for researchers who are working in the area of compact and analytical modelling of semiconductor devices.
eBook
RF/microwave circuit design for wireless applications
ULRICH L. ROHDE, PhD, Dr.-ing habil., is Chairman of Synergy Microwave Corporation; a partner of Rohde & Schwarz; and Professor of Microwave and RF Technology at the Brandenburgische Technische Universität Cottbus, Germany. He is a Fellow of the IEEE. MATTHIAS RUDOLPH, PhD, Dr.-ing, is the Ulrich L. Rohde Professor for RF and Microwave Techniques at Brandenburgische Technische Universität Cottbus, Germany. He worked previously at the Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH) in charge of GaAs semiconductor nonlinearity and noise modeling.
eBook
Computational lithography
A Unified Summary of the Models and Optimization Methods Used in Computational Lithography Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology.
eBook
Semiconductor manufacturing handbook
After a difficult period, the semiconductor manufacturing industry is growing again, with significant prospects in the world market. This concise reference brings the full range of semiconductor fabrication technologies and methods to the engineer's fingertips.
Book
Synchronization and arbitration in digital systems
Today's networks of processors on and off chip, operating with independent clocks, need effective synchronization of the data passing between them for reliability. When two or more processors request access to a common resource, such as a memory, an arbiter has to decide which request to deal with first.
eBook