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result(s) for
"Plasma diagnostics"
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Electron characterization in weakly ionized collisional plasmas: from principles to techniques
by
Choe, Wonho
,
Moon, Se Youn
,
Park, Sanghoo
in
52.25.-b Plasma properties
,
52.50.-b Plasma production and heating
,
52.70.-m Plasma diagnostic techniques and instrumentation
2019
Weakly ionized plasmas at or near 1 atm pressure, or atmospheric-pressure plasmas, have received increasing attention due to their scientific significance and potential for use in a variety of applications, particularly for medicine, agriculture, and food. However, there is a large imbalance between scientific research on plasma physics and applications, which is partly due to the considerable differences in the characteristics of these plasmas compared with those of low-pressure plasmas. This discrepancy is particularly related to the difficulty in performing plasma diagnostics for highly collisional plasmas. Information on electrons (such as the electron density and temperature) is essential since electrons play a dominant role in the generation of active species related to the physical and chemical processes inside the plasma. So far, limited diagnostics have been available for electrons such as Thomson scattering and optical emission diagnostics based on equilibrium models. Here, we review the available diagnostic methods along with their merits and limitations for characterizing electrons in weakly ionized collisional plasmas. Particular attention is paid to continuum radiation-based spectroscopy, which facilitates multidimensional imaging of electron density and temperature. The future impact of these plasmas on relevant fields (i.e. laboratory and industrial plasmas and their applications) is also addressed.
Journal Article
A retarding field thermal probe for combined plasma diagnostics
2023
The wide variety and ever-growing applications of plasma processes in research and industry require an equally growing diversity and accessibility of suitable plasma diagnostics. The plasma parameters and the tailoring thereof strongly influence the outcome of thin film deposition, plasma etching, or surface treatments, to name only a few. To further enhance the determination of different fluxes of species, their energies, and behaviour influencing a surface process, a custom-built combination of two commonly used diagnostics was developed. With a retarding field energy analyzer, one can obtain the ion energy distribution in a plasma by measuring the current at the collector depending on the applied voltage at the scan grid. A passive thermal probe determines the energy flux density coming from a process plasma by measuring the temperature change of a dummy substrate. In this study, we present a retarding field energy analyzer where a passive thermal probe substitutes the collector. By doing so, we can determine the energy distribution of the charged ions, their energy flux density at a certain potential, and the power deposited onto a substrate. Another advantage is that the thermal probe can even measure the power deposited by incoming (fast) neutrals and of the background gas when the grids keep away the ions. Hence, combining these two powerful diagnostics yields information neither can deliver on their own. The probe has been tested in three different plasma environments: ion beam source, magnetron sputtering and radio frequency discharge plasma.
Journal Article
A Wide-Range High-Resolution X-ray Crystal Spectrometer for Laser–Plasma Diagnostics
2023
Wide-range crystal spectrometers are important tools for performing X-ray spectroscopic measurements of medium- and high-Z tracer elements in research on laser-driven inertial confinement fusion (ICF) plasmas. In this paper, we propose a wide-range high-resolution crystal spectrometer based on a tandem array of crystals that have the same geometric parameters. We have developed a three-channel crystal spectrometer that covers the range of 8–18 keV by combining Ge , Ge , and Ge crystals. Here, we report the design, optical simulations, and X-ray test experiments of this spectrometer. The calibration results indicate that the spectral resolution E/ΔE is greater than 2800 at 8.048 keV. By selecting appropriate Bragg angles, crystal materials, orientations, or other geometrical parameters, the wide-range crystal spectrometer developed in this paper can also be used to make measurements in other energy ranges.
Journal Article
A Finite-Difference Approach for Plasma Microwave Imaging Profilometry
by
Sorbello, Gino
,
Morabito, Andrea F.
,
Mascali, David
in
Approximation
,
Boundary conditions
,
electromagnetic inverse scattering
2019
Plasma diagnostics is a topic of great interest in the physics and engineering community because the monitoring of plasma parameters plays a fundamental role in the development and optimization of plasma reactors. Towards this aim, microwave diagnostics, such as reflectometric, interferometric, and polarimetric techniques, can represent effective means. Besides the above, microwave imaging profilometry (MIP) may allow the obtaining of tomographic, i.e., volumetric, information of plasma that could overcome some intrinsic limitations of the standard non-invasive diagnostic approaches. However, pursuing MIP is not an easy task due to plasma’s electromagnetic features, which strongly depend on the working frequency, angle of incidence, polarization, etc., as well as on the need for making diagnostics in both large (meter-sized) and small (centimeter-sized) reactors. Furthermore, these latter represent extremely harsh environments, wherein different systems and equipment need to coexist to guarantee their functionality. Specifically, MIP entails solution of an inverse scattering problem, which is non-linear and ill-posed, and, in addition, in the one-dimensional case, is also severely limited in terms of achievable reconstruction accuracy and resolution. In this contribution, we address microwave inverse profiling of plasma assuming a high-frequency probing regime when magnetically confined plasma can be approximated as both an isotropic and weak penetrable medium. To this aim, we adopt a finite-difference frequency-domain (FDFD) formulation which allows dealing with non-homogeneous backgrounds introduced by unavoidable presence of plasma reactors.
Journal Article
The planar Multipole Resonance Probe: a functional analytic approach
2018
Active Plasma Resonance Spectroscopy (APRS) is a well known diagnostic method, where a radio frequency probe is immersed into a plasma and excites plasma oscillations. The response of the plasma is recorded as frequency dependent spectrum, in which resonance peaks occur. By means of a mathematical model plasma parameters like the electron density or the electron temperature can be determined from the detected resonances.The majority of all APRS probes have in common, that they are immersed into the plasma and perturb the plasma due to the physical presence of the probe. Thus, they are invasive and can at least influence the homogeneity of the plasma. To overcome this problem, the planar Multipole Resonance Probe (pMRP) was invented, which can be integrated into the chamber wall of a plasma reactor.Within this paper, the first analytic model of the pMRP is presented, which is based on a cold plasma description of the electrons. The general admittance of the probe-plasma system is derived by means of functional analytic methods and a complete orthonormal set of basis functions. Explicit spectra for an approximated admittance including a convergence study are shown. The determined resonance frequencies are in good agreement with former simulation results.
Journal Article
Schlieren imaging: a powerful tool for atmospheric plasma diagnostic
by
Gherardi, Matteo
,
Settles, Gary S
,
Traldi, Enrico
in
Atmospheric pressure
,
Diagnostic software
,
Diagnostic systems
2018
Schlieren imaging has been widely used in science and technology to investigate phenomena occurring in transparent media. In particular, it has proven to be a powerful tool in fundamental studies and process optimization for atmospheric pressure plasma diagnostics, providing qualitative and (in some cases) also quantitative information on the fluid-dynamic characteristics of plasmas generated by many different types of sources. However, obtaining significant and reliable results by schlieren imaging can be challenging, especially when considering the variety of geometries and applications of atmospheric pressure plasma sources. Therefore, it is necessary to adopt solutions that can address the specific issues of different plasma-assisted processes. In this paper, an overview on the use of the schlieren imaging technique for atmospheric pressure plasma characterization is presented. In the first part, the physical principles behind this technique and the different setups that can be adopted to perform it are presented. In the second part, examples of schlieren imaging applied to different kinds of atmospheric pressure plasmas (non-equilibrium plasma jets, plasma actuators for flow control and thermal plasma sources) are presented, showing how it was used to characterize the fluid-dynamic behavior of plasma-assisted processes and reporting best practices in performing this diagnostic technique.
Journal Article
Ultrasound guided injections of Platelets Rich Plasma for muscle injury in professional athletes. Comparative study
2013
Professional athletes require faster recovery after trauma. The aim of our study was to evaluate the efficacy of ultrasound guided platelets rich plasma (PRP) treatment for acute muscle injury comparing with traditional conservative therapy. Thirty consecutive men (mean age 24 years old) professional athletes with acute local muscle injury were enrolled. All patients underwent US and sonoelastography examination. Patients were randomly assigned to 2 groups: group A received targeted PRP injection under US guidance and additionally conservative treatment and group B received conventional conservative treatment only. The pain was assessed according to visual analogue scale (0 to 10), muscle function according to pain on resisted flexion or strength, and range of motion. Both groups were further evaluated in the days 1, 7, 14, 21, and 28 after treatment starting. US criteria for regeneration were considered to be the disappearance of hypoechoic areas of muscle damage, fibrous tissue more stiff on sonoelastography, and neovascularity appearances. The pain relief was more important in group A compared to group B starting from day 1 and continuing in the next 3 evaluation sessions (p<0.05). At the end of observation (28 day), 93 % of pain regression was declared by patients in group A vs 80 % of regression of pain in group B (p>0.05). Assessing the physical evolution in the 7th and 14th days significant changes in strength (p<0.05) and range of motion (p<0.05) for PRP treatment group was observed. After 28 days no significant differences between groups were observed concerning the pain on resisted flexion and strength (p>0.05) but the range of movement improved better in group A compared with group B (p< 0.05). Subjective global function scores improved significantly in group A compared with group B on the 28th day (p<0.05). The mean time for the physical recovery movement volume and the ability to practice sport was 10+/-1.2 days in group A and 22+/-1.5 days in group B. Injections of PRP under ultrasound guidance had asignificantly higher level of pain relief, physical recovery, and faster regeneration compared with conventional conservative treatment in acute muscle trauma in professional athletes.
Journal Article
Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiOsub.2
by
Lee, Jangjae
,
Cho, Chulhee
,
You, Shinjae
in
Integrated circuit fabrication
,
Methods
,
Plasma diagnostics
2022
As low-temperature plasma plays an important role in semiconductor manufacturing, plasma diagnostics have been widely employed to understand changes in plasma according to external control parameters, which has led to the achievement of appropriate plasma conditions normally termed the process window. During plasma etching, shifts in the plasma conditions both within and outside the process window can be observed; in this work, we utilized various plasma diagnostic tools to investigate the causes of these shifts. Cutoff and emissive probes were used to measure the electron density and plasma potential as indicators of the ion density and energy, respectively, that represent the ion energy flux. Quadrupole mass spectrometry was also used to show real-time changes in plasma chemistry during the etching process, which were in good agreement with the etching trend monitored via in situ ellipsometry. The results show that an increase in the ion energy flux and a decrease in the fluorocarbon radical flux alongside an increase in the input power result in the breaking of the process window, findings that are supported by the reported SiO[sub.2] etch model. By extending the SiO[sub.2] etch model with rigorous diagnostic measurements (or numerous diagnostic methods), more intricate plasma processing conditions can be characterized, which will be beneficial in applications and industries where different input powers and gas flows can make notable differences to the results.
Journal Article
Plasma Modification Techniques for Natural Polymer-Based Drug Delivery Systems
by
Chinni, Suresh V.
,
Subramaniyan, Vetriselvan
,
Sekar, Mahendran
in
Atmospheric pressure
,
Biocompatibility
,
Biopolymers
2023
Natural polymers have attracted significant attention in drug delivery applications due to their biocompatibility, biodegradability, and versatility. However, their surface properties often limit their use as drug delivery vehicles, as they may exhibit poor wettability, weak adhesion, and inadequate drug loading and release. Plasma treatment is a promising surface modification technique that can overcome these limitations by introducing various functional groups onto the natural polymer surface, thus enhancing its physicochemical and biological properties. This review provides a critical overview of recent advances in the plasma modification of natural polymer-based drug delivery systems, with a focus on controllable plasma treatment techniques. The review covers the fundamental principles of plasma generation, process control, and characterization of plasma-treated natural polymer surfaces. It discusses the various applications of plasma-modified natural polymer-based drug delivery systems, including improved biocompatibility, controlled drug release, and targeted drug delivery. The challenges and emerging trends in the field of plasma modification of natural polymer-based drug delivery systems are also highlighted. The review concludes with a discussion of the potential of controllable plasma treatment as a versatile and effective tool for the surface functionalization of natural polymer-based drug delivery systems.
Journal Article
Design and construction of the near-earth space plasma simulation system of the Space Plasma Environment Research Facility
2024
Our earth is immersed in the near-earth space plasma environment, which plays a vital role in protecting our planet against the solar-wind impact and influencing space activities. It is significant to investigate the physical processes dominating the environment, for deepening our scientific understanding of it and improving the ability to forecast the space weather. As a crucial part of the National Major Scientific and Technological Infrastructure–Space Environment Simulation Research Infrastructure (SESRI) in Harbin, the Space Plasma Environment Research Facility (SPERF) builds a system to replicate the near-earth space plasma environment in the laboratory. The system aims to simulate the three-dimensional (3-D) structure and processes of the terrestrial magnetosphere for the first time in the world, providing a unique platform to reveal the physics of the 3-D asymmetric magnetic reconnection relevant to the earth's magnetopause, wave–particle interaction in the earth's radiation belt, particles’ dynamics during the geomagnetic storm, etc. The paper will present the engineering design and construction of the near-earth space plasma simulation system of the SPERF, with a focus on the critical technologies that have been resolved to achieve the scientific goals. Meanwhile, the possible physical issues that can be studied based on the apparatus are sketched briefly. The earth-based system is of great value in understanding the space plasma environment and supporting space exploration.
Journal Article