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Micro- and nano-sensors lie at the heart of critical innovation in fields ranging from medical to environmental sciences. In recent years, there has been a significant improvement in sensor design along with the advances in micro- and nano-fabrication technology and the use of newly designed materials, leading to the development of high-performance gas sensors. Advanced micro- and nano-fabrication technology enables miniaturization of these sensors into micro-sized gas sensor arrays while maintaining the sensing performance. These capabilities facilitate the development of miniaturized integrated gas sensor arrays that enhance both sensor sensitivity and selectivity towards various analytes. In the past, several micro- and nano-gas sensors have been proposed and investigated where each type of sensor exhibits various advantages and limitations in sensing resolution, operating power, response, and recovery time. This paper presents an overview of the recent progress made in a wide range of gas-sensing technology. The sensing functionalizing materials, the advanced micro-machining fabrication methods, as well as their constraints on the sensor design, are discussed. The sensors’ working mechanisms and their structures and configurations are reviewed. Finally, the future development outlook and the potential applications made feasible by each category of the sensors are discussed.

This work is a comprehensive review of sensing materials, which interact with several target gases pertinent to agricultural monitoring applications. Sensing materials which interact with carbon dioxide, water vapor (relative humidity), hydrogen sulfide, ethylene and ethanol are the focus of this work. Performance characteristics such as dynamic range, recovery time, operating temperature, long-term stability and method of deposition are discussed to determine the commercial viability of the sensing materials considered in this work. In addition to the sensing materials, deposition methods are considered to obtain the desired sensing material thickness based on the sensor’s mechanism of operation. Various material classes including metal oxides, conductive polymers and carbon allotropes are included in this review. By implementing multiple sensing materials to detect a single target analyte, the issue of selectivity due to cross sensitivity can be mitigated. For this reason, where possible, it is desirable to utilize more than one sensing material to monitor a single target gas. Among those considered in this work, it is observed that PEDOT PSS/graphene and TiO2-coated g-C3N4 NS are best suited for CO2 detection, given their wide dynamic range and modest operating temperature. To monitor the presence of ethylene, BMIM-NTf2, SWCNTs and PtTiO2 offer a dynamic range most suitable for the application and require no active heating. Due to the wide dynamic range offered by SiO2/Si nanowires, this material is best suited for the detection of ethanol; a gas artificially introduced to prolong the shelf life of the harvested crop. Finally, among all other sensing materials investigated, it observed that both SWCNTs and CNTs/SnO2/CuO are most suitable for H2S detection in the given application.

Concrete strength and factors affecting its development during early concrete curing are important research topics. Avoiding uncertain incidents during construction and in service life of structures requires an appropriate monitoring system. Therefore, numerous techniques are used to monitor the health of a structure. This paper presents a nondestructive testing technique for monitoring the strength development of concrete at early curing ages. Dispersed carbon nanotubes (CNTs) were used with cementitious materials and piezoelectric (PZT) material, a PZT ceramic, owing to their properties of intra electromechanical effects and sensitivity to measure the electromechanical impedance (EMI) signatures and relevant properties related to concrete strength, such as the elastic modulus, displacement, acceleration, strength, and loading effects. Concrete compressive strength, hydration temperature, mixture ratio, and variation in data obtained from the impedance signatures using fuzzy logic were utilized in the comparative result prediction method for concrete strength. These results were calculated using a fuzzy logic-based model considering the maturity method, universal testing machine (UTM) data, and analyzed EMI data. In the study, for data acquisition, a hybrid PZT–CNT sensor and a temperature sensor (Smart Rock) were embedded in the concrete to obtain the hydration temperature history to utilize the concrete maturity method and provide data on the EMI signatures. The dynamic changes in the medium caused during the phase in the concrete strengthening process were analyzed to predict the strength development process of concrete at early curing ages. Because different parameters are considered while calculating the concrete strength, which is related to its mechanical properties, the proposed novel method considers that changes in the boundary condition occurring in the concrete paste modify the resonant frequency response of the structure. Thus, relating and analyzing this feature can help predict the concrete strength. A comprehensive comparison of the results calculated using the proposed module, maturity method, and cylindrical specimens tested using the UTM proved that it is a cost-effective and fast technique to estimate concrete strength to ensure a safe construction of reinforced cement concrete infrastructures.

This chapter contains sections titled: Introduction Evolution of Sensors with Nanotechnology Micro(nano)sensors Nanoprobes for In Vivo Bioanalysis References

Flexible pressure sensors have attracted great attention due to their potential in the wearable devices market and in particular in human-machine interactive interfaces. Pressure sensors with high sensitivity, wide measurement range, and low-cost are now highly desired for such practical applications. In the present investigation, an ultrasensitive pressure sensor with wide measurement range has been successfully fabricated. Carbon nanotubes (CNTs) (uniformly sprayed on the surface of paper) comprise the sensitivity material, while lithographed interdigital electrodes comprise the substrate. Due to the synergistic effects of CNT’s high specific surface area, paper’s porous structure, interdigital electrodes’ efficient contact with CNT, our pressure sensor realizes a wide measurement range from 0 to 140 kPa and exhibits excellent stability through 15,000 cycles of testing. For the paper-based CNT film/interdigitated structure (PCI) pressure sensor, the connection area between the sensitive material and interdigital electrodes dominates in the low-pressure region, while internal change within the sensitive materials plays the leading role in the high-pressure region. Additionally, the PCI pressure sensor not only displays a high sensitivity of 2.72 kPa−1 (up to 35 kPa) but also can detect low pressures, such as that exerted by a resting mung bean (about 8 Pa). When attached to the surface of a human body, the pressure sensor can monitor physiological signals, such as wrist movement, pulse beats, or movement of throat muscles. Furthermore, the pressure sensor array can identify the spatial pressure distribution, with promising applications in human-machine interactive interfaces.

The main purpose of structural health monitoring (SHM) is to detect damage at its earliest possible stage to prevent severe deterioration and reduce subsequent repair costs. Carbon nanotubes (CNTs) buckypaper (BP) was embedded into different cross-ply glass fibre composites to monitor the curing process and impact damage as an in situ sensor in this research. BP sensor can capture the four stages of the curing process, the gel point of the resin and residual stresses of the composite structure can be achieved by analysing the change of the resistance curve. Numerical and experimental analyses were performed to predict the damage in composite structures subjected to low-velocity impact. BP sensors\" electrical resistance increases with repeated impact loading; composite structure elastic deformation and damage evolution can be identified from resistance change. Experiment results show that structure monitoring based on the BP sensors cannot only detect small, barely visible impact damage flaws and the damage evaluation of composite structures subjected to impact, but also provide a new method to monitor the curing process through the analysis of results. This work makes some constructive contributions to monitoring the manufacturing process of composites and long-term SHM to evaluate impact resistance and damage prediction of composite structures.

Despite recent research on joint motion measurement to monitor human body movement, current measurement techniques and tools have significant limitations, including requiring large space for measurement and causing discomfort in test subjects wearing motion sensors. Our study aims, first, to develop carbon nanotube (CNT)-based textile joint motion sensors. Second, ours study aims to identify the most suitable CNT-based sensor structure and attachment method for use on a wearable platform during general exercise speeds. Lastly, we used these sensors on the human body, using sleeves and legs to find the most stable location, and we used the CNT-based sensor condition to monitor joint motions. We utilized our CNT-based sensor, which has proper elasticity as well as conductivity, and applied it to the elbow and knee joints. Based on the strain gauge principle, we monitored the variance of electric resistance that occurred when the CNT-based sensor was stretched due to limb motion. Our study tested 48 types of sensors. These sensors were applied to the CNT using different base knit textiles as well as different attachment methods, layers, sensor lengths, and sensor widths. The four most successful sensor types, which showed superior efficacy over the others in joint motion measurement, were selected for further study. These four sensors were then used to measure the elbow and knee joint motions of human subjects by placing them on different locations on sleeves and legs. The CNT knit textile sensors best suited to measuring joint motions are those with a double-layered CNT knit and 5 cm long × 0.5 cm or 1 cm wide sensors attached to a polyester¬-based knit using a welding method. The best position for the sensor to more stably monitor joint motions was the “below hinge position” from the elbow or knee hinge joint. Our study suggests an alternative strategy for joint-motion measurement that could contribute to the development of more comfortable and human-friendly methods of human limb motion measurement.

Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a local CNT synthesis process using thermal chemical vapor deposition (CVD) requires temperatures near 900 °C, which is destructive for CMOS circuits. Therefore, it is necessary to ensure a high thermal gradient around the CNT growth structures to maintain CMOS-compatible temperature (below 300 °C) on the bulk part of the chip, where readout circuits are placed. This paper presents several promising designs of CNT growth microstructures and their thermomechanical analyses (by ANSYS Multiphysics software) to check the feasibility of local CNT synthesis in CMOS. Standard CMOS processes have several conductive interconnecting metal and polysilicon layers, both being suitable to serve as microheaters for local resistive heating to achieve the CNT growth temperature. Most of these microheaters need to be partially or fully suspended to produce the required thermal isolation for CMOS compatibility. Necessary CMOS post-processing steps to realize CNT growth structures are discussed. Layout designs of the microstructures, along with some of the microstructures fabricated in a standard AMS 350 nm CMOS process, are also presented in this paper.

Accurate monitoring of sodium and potassium ions in biological fluids is crucial for diseases related to electrolyte imbalance. Low-dimensional materials such as carbon nanotubes can be used to construct biochemical sensors based on high-performance field effect transistor (FET), but they face the problems of poor device consistency and difficulty in stable and reliable operation. In this work, we mass-produced carbon nanotube (CNT) floating-gate field-effect transistor devices with high uniformity and consistency through micro-/nanofabrication technology to improve the accuracy and reliability of detection without the need for statistical analysis based on machine learning. By introducing waterproof hafnium oxide gate dielectrics on the CNT FET channel, we not only effectively protect the channel area but also significantly improve the stability of the sensor. We have prepared array sensing technology based on CNT FET that can detect potassium, sodium, calcium, and hydrogen ions in artificial cerebrospinal fluid. The detection concentration range is 10 μM–100 mM and pH 3–pH 9, with a sensitivity close to the Nernst limit, and exhibits selective and long-term stable responses. This could help achieve early diagnosis and real-time monitoring of central nervous system diseases, highlighting the potential of this ion-sensing platform for highly sensitive and stable detection of various neurobiological markers.

The olfactory receptor neurons of insects and vertebrates are gated by odorant receptor (OR) proteins of which several members have been shown to exhibit remarkable sensitivity and selectivity towards volatile organic compounds of significant importance in the fields of medicine, agriculture and public health. Insect ORs offer intrinsic amplification where a single binding event is transduced into a measurable ionic current. Consequently, insect ORs have great potential as biorecognition elements in many sensor configurations. However, integrating these sensing components onto electronic transducers for the development of biosensors has been marginal due to several drawbacks, including their lipophilic nature, signal transduction mechanism and the limited number of known cognate receptor-ligand pairs. We review the current state of research in this emerging field and highlight the use of a group of indole-sensitive ORs (indolORs) from unexpected sources for the development of biosensors.