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This paper reviews and compares electrostatically actuated MEMS (micro-electro-mechanical system) arrays for light modulation and light steering in which transmission through the substrate is required. A comprehensive comparison of the technical achievements of micromirror arrays and microshutter arrays is provided. The main focus of this paper is MEMS micromirror arrays for smart glass in building windows and façades. This technology utilizes millions of miniaturized and actuatable micromirrors on transparent substrates, enabling use with transmissive substrates such as smart windows for personalized daylight steering, energy saving, and heat management in buildings. For the first time, subfield-addressable MEMS micromirror arrays with an area of nearly 1 m2 are presented. The recent advancements in MEMS smart glass technology for daylight steering are discussed, focusing on aspects like the switching speed, scalability, transmission, lifetime study, and reliability of micromirror arrays. Finally, simulations demonstrating the potential yearly energy savings for investments in MEMS smart glazing are presented, including a comparison to traditional automated external blind systems in a model office room with definite user interactions throughout the year. Additionally, this platform technology with planarized MEMS elements can be used for laser safety goggles to shield pilots, tram, and bus drivers as well as security personal from laser threats, and is also presented in this paper.

This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology.

This paper presents modeling and analysis of light diffraction and light-intensity modulation performed by an optical phased array (OPA) system based on metal-coated silicon micromirrors. The models can be used in the design process of a microelectromechanical system (MEMS)-based OPA device to predict its optical performance in terms of its field of view, response, angular resolution, and long-range transmission. Numerical results are derived using an extended model for the 1st-order diffracted light intensity modulation due to phase shift. The estimations of the optical characteristics are utilized in the designs of an OPA system capable of active phase modulation and an OPA system capable of array pitch tuning. Both designs are realized using the Multi-User MEMS Processes (PolyMUMPs) in which polysilicon is used as structural material for the MEMS-actuated mirrors. The experiments are performed to evaluate the optical performance of the prototypes. The tests show that the individually actuated micromirrors, which act as phase shifters, can transmit the most optical power along the 1st-order diffracted beam by actively changing their out-of-plane positions. In addition, the 1st-order diffracted beam with high optical intensity can be steered for distance measurement.

We present a method to fabricate planar metal layers to be used as micromachined mirrors. Released mirrors of pure metal involve severe stress and reveal specific challenges to obtain planar mirror structures. Introducing sub-structures generating corrugated patterns, the metal mirror layers can be mechanically stabilized and undesired mirror bending can be reduced. For our investigations we used different arrangements of line structures on our metal mirrors, such as a group of straight or curved lines oriented differently. Comparing all the implemented different designs, planar micromirrors were achieved via sub-structures with a combination of straight lines arranged orthogonally to a single line. These planar micromirrors allow steering of the incident light by reflection and adjustment of the window transmittance. The presented low-cost method is suitable for large area fabrication of micromirror arrays, but also can be customized for other applications, where planar free-standing metal layers are required.

Phase-change materials (PCMs) offer a compelling platform for active metaoptics, owing to their large index contrast and fast yet stable phase transition attributes. Despite recent advances in phase-change metasurfaces, a fully integrable solution that combines pronounced tuning measures, i.e., efficiency, dynamic range, speed, and power consumption, is still elusive. Here, we demonstrate an in situ electrically driven tunable metasurface by harnessing the full potential of a PCM alloy, Ge 2 Sb 2 Te 5 (GST), to realize non-volatile, reversible, multilevel, fast, and remarkable optical modulation in the near-infrared spectral range. Such a reprogrammable platform presents a record eleven-fold change in the reflectance (absolute reflectance contrast reaching 80%), unprecedented quasi-continuous spectral tuning over 250 nm, and switching speed that can potentially reach a few kHz. Our scalable heterostructure architecture capitalizes on the integration of a robust resistive microheater decoupled from an optically smart metasurface enabling good modal overlap with an ultrathin layer of the largest index contrast PCM to sustain high scattering efficiency even after several reversible phase transitions. We further experimentally demonstrate an electrically reconfigurable phase-change gradient metasurface capable of steering an incident light beam into different diffraction orders. This work represents a critical advance towards the development of fully integrable dynamic metasurfaces and their potential for beamforming applications. The authors demonstrate an efficient platform for electrically driven reconfigurable metasurfaces by using Ge 2 Sb 2 Te 5 to realize non-volatile, reversible, multilevel, and fast optical modulation and wavefront engineering in the near-infrared spectral range.

Photonic topological insulators provide a route for disorder-immune light transport, which holds promise for practical applications. Flexible reconfiguration of topological light pathways can enable high-density photonics routing, thus sustaining the growing demand for data capacity. By strategically interfacing non-Hermitian and topological physics, we demonstrate arbitrary, robust light steering in reconfigurable non-Hermitian junctions, in which chiral topological states can propagate at an interface of the gain and loss domains. Our non-Hermitian–controlled topological state can enable the dynamic control of robust transmission links of light inside the bulk, fully using the entire footprint of a photonic topological insulator.

Rapidly developing augmented reality, solid-state light detection and ranging (LIDAR), and holographic display technologies require spatial light modulators (SLMs) with high resolution and viewing angle to satisfy increasing customer demands. Performance of currently available SLMs is limited by their large pixel sizes on the order of several micrometers. Here, we propose a concept of tunable dielectric metasurfaces modulated by liquid crystal, which can provide abrupt phase change, thus enabling pixel-size miniaturization. We present a metasurface-based transmissive SLM, configured to generate active beam steering with >35% efficiency and a large beam deflection angle of 11°. The high resolution and steering angle obtained provide opportunities to develop the next generation of LIDAR and display technologies.

Explanations of why nocturnal insects fly erratically around fires and lamps have included theories of “lunar navigation” and “escape to the light”. However, without three-dimensional flight data to test them rigorously, the cause for this odd behaviour has remained unsolved. We employed high-resolution motion capture in the laboratory and stereo-videography in the field to reconstruct the 3D kinematics of insect flights around artificial lights. Contrary to the expectation of attraction, insects do not steer directly toward the light. Instead, insects turn their dorsum toward the light, generating flight bouts perpendicular to the source. Under natural sky light, tilting the dorsum towards the brightest visual hemisphere helps maintain proper flight attitude and control. Near artificial sources, however, this highly conserved dorsal-light-response can produce continuous steering around the light and trap an insect. Our guidance model demonstrates that this dorsal tilting is sufficient to create the seemingly erratic flight paths of insects near lights and is the most plausible model for why flying insects gather at artificial lights. It is unclear why flying insects congregate around artificial light sources. Here, the authors use high-speed videography and motion-capture, finding that insects fly perpendicular to light sources due to a disruption of the dorsal light response.

The capability of on-chip wavefront modulation has the potential to revolutionize many optical device technologies. However, the realization of power-efficient phase-gradient metasurfaces that offer full-phase modulation (0 to 2π) and high operation speeds remains elusive. We present an approach to continuously steer light that is based on creating a virtual frequency-gradient metasurface by combining a passive metasurface with an advanced frequency-comb source. Spatiotemporal redirection of light naturally occurs as optical phase-fronts reorient at a speed controlled by the frequency gradient across the virtual metasurface. An experimental realization of laser beam steering with a continuously changing steering angle is demonstrated with a single metasurface over an angle of 25° in just 8 picoseconds. This work can support integrated-on-chip solutions for spatiotemporal optical control, directly affecting emerging applications such as solid-state light detection and ranging (LIDAR), three-dimensional imaging, and augmented or virtual systems.

Metasurfaces offer the possibility to shape optical wavefronts with an ultracompact, planar form factor. However, most metasurfaces are static, and their optical functions are fixed after the fabrication process. Many modern optical systems require dynamic manipulation of light, and this is now driving the development of electrically reconfigurable metasurfaces. We can realize metasurfaces with fast (>10⁵ hertz), electrically tunable pixels that offer complete (0- to 2π) phase control and large amplitude modulation of scattered waves through the microelectromechanical movement of silicon antenna arrays created in standard silicon-on-insulator technology. Our approach can be used to realize a platform technology that enables low-voltage operation of pixels for temporal color mixing and continuous, dynamic beam steering and light focusing.