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Guiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the reaction force and implements a constant reaction force. We show the influence of the tilting angle on the reaction force, on the spring stiffness and spring selectivity. Furthermore, we investigate the influence of the different spring geometry parameters on the spring reaction force. We experimentally show tilted triangular springs exhibiting constant force reactions in a large deflection range and a comb-drive actuator guided by tilted triangular springs.

A novel inertial micro-switch capable of prolonging contact time and reducing the contact-bouncing effect is proposed. Based on the nonlinear-spring shock stop, both the moveable and the fixed electrodes are made flexible by using a moveable contact point and a cascaded beam, respectively. The switch was successfully fabricated by bulk micromachining process. From the drop hammer test, the switch-on time increased with an increase of the input acceleration and reached a maximum of 335 μs, which is over 30 times larger than that of the traditional switch; and no bounce occurred.

Ongoing miniaturization in various technical fields such as the electronics industry or micro-systems technology requires precise forming processes for the production of small and thin components; for example, thin metal foils are being used in microelectromechanical systems, electronic components, and medical devices. In the same manner as micro bulk-metal-forming processes, metal foils with thicknesses in the range of microns are subjected to so-called size effects. Previous investigations of various metal-forming processes have shown the share of surface grains to be a decisive factor in micro foil forming behaviour. Besides this general size effect, every forming process exhibits specific size effects. In the case of bending processes, large strain gradients are present, influencing the bending parameters and process accuracy (e.g. spring-back). In the present paper, a free bending concept is introduced, which enables the determination of size effects that occur. The mechanical properties and bending behaviour of metal foils with thicknesses ranging from 25 μm to 500 μm are discussed in terms of material properties, microstructure, and foil thickness. Fundamental experiments are performed, providing an experimental basis for future development of theoretical models to describe strain gradient-dependent forming behaviour of foil bending processes. The experimental results are compared with finite element simulations and the strain hardening behaviour is characterized by micro-indentation tests.

Nanoscience offers fascinating opportunities for science education as it links the achievements of modern technology to traditional models of science. In this article we present a nanotechnology orientated lesson on oscillations, suitable for physics courses at high schools and universities. The focus of the lesson is in forced oscillations on a cantilever beam used as a sensor in scanning probe microscopy or as an independent micro mechanical force sensor.

An innovative magnetically levitated system design is presented in this paper. The proof mass, used as the seismic detection components for gyroscopes, is levitated by the presented micro-coil actuator so that the concerns that mechanical fatigue, asymmetry and mis-alignments, which are inevitably present in the traditional mechanical springs design, can be ruled out. In addition, the limited range of dual-axis motion of the proof mass is completely relaxed and therefore the resolution and sensitivity of the gyroscope can be greatly upgraded. That is, the proof mass can be much at higher frequencies and the stroke of the sense-mode motion can be more enlarged, in comparison with the conventional design (i.e., mechanical springs). In addition, self-sensing technique is employed to replace the gap sensors which provide the feedback signal for position regulation of the proof mass, for the sake of cost-down for mass production. A sliding mode control strategy is included to account for the effects of nonlinearity of the maglev system dynamics and hysteresis uncertainty of the micro-coil actuator. The proposed controller is verified by computer simulations and experiments to illustrate its superior capability to stabilize the inherently unstable maglev system and ensure fast response for the lateral position regulation of the seismic proof mass.

In this paper, we design a Z-type microspring, which consists of several “Z” type micromechanical beams within mutual connection. With good mechanical performance and mature LIGA fabrication technology, Ni is chosen as the material of Z-type MEMS microspring. The mechanical properties of electroformed Ni have been tested by the Micro Hardness Tester, and the Young’s modulus is 219 GPa. Different from traditional springs, microsprings can be divided into three application patterns in direction x, y, and z to study. Applying the Castigliano second theorem of energy method in macro theory, the formulas used to calculate the spring constant of Z-type microspring in the directions of the three application patterns were derived, and verified by the ANSYS finite element method. Using the Tytron250 micro force test machine, the experiments of the Z-type microspring deformation properties were carried out. The spring constant, rupture force and rupture strength of Z-type microspring in direction y are 3821 N/m, 1.64 N and 1.61 GPa, respectively. The experimental results agree with the theoretical analysis. Based on the analysis above, the change laws of the spring constant of microspring in the three application patterns are summarized.

Results of the design, microfabrication and testing of a proof-of-concept, diaphragm-type silicone sealing joint are presented. DRIE-etched cavities were filled with a flexible sealing element made of polydimethylsiloxane that supports a silicon piston. A series of sealing joints were produced with variable widths, and the displacement of the piston was measured after applying pressures of up to 1 bar above atmospheric pressure in 0.2 bar increments. Two masks were designed to produce several sets of silicone springs with widths of 2–10.5 μm, each consisting of a 10 μm thick silicon piston that is 2 mm long. Tests performed on the shear spring joints were found to give a displacement of 0.5 μm at 1 bar when the sealing width is 6 μm or more. The sealing joint with a 10 μm width was found to give a displacement of 0.9 μm and an elastic recovery of 88%. The results showed this type of joint in the form of an elastically-deforming seal provides sufficient displacement for propelling liquid droplets as part of a liquid propulsion system.