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Metalenses are attractive alternatives to conventional bulky refractive lenses owing to their superior light-modulating performance and sub-micrometre-scale thicknesses; however, limitations in existing fabrication techniques, including high cost, low throughput and small patterning area, have hindered their mass production. Here we demonstrate low-cost and high-throughput mass production of large-aperture visible metalenses using deep-ultraviolet argon fluoride immersion lithography and wafer-scale nanoimprint lithography. Once a 12″ master stamp is imprinted, hundreds of centimetre-scale metalenses can be fabricated using a thinly coated high-index film to enhance light confinement, resulting in a substantial increase in conversion efficiency. As a proof of concept, an ultrathin virtual reality device created with the printed metalens demonstrates its potential towards the scalable manufacturing of metaphotonic devices.The authors propose a method for the scalable manufacturing of metalenses using deep-ultraviolet argon fluoride immersion lithography and wafer-scale nanoimprint lithography, opening a route towards their low-cost, high-throughput mass production.

Ultrasensitive nanomechanical instruments, e.g. atomic force microscopy (AFM), can be used to perform delicate biomechanical measurements and reveal the complex mechanical environment of biological processes. However, these instruments are limited because of their size and complex feedback system. In this study, we demonstrate a miniature fiber optical nanomechanical probe (FONP) that can be used to detect the mechanical properties of single cells and in vivo tissue measurements. A FONP that can operate in air and in liquids was developed by programming a microcantilever probe on the end face of a single-mode fiber using femtosecond laser two-photon polymerization nanolithography. To realize stiffness matching of the FONP and sample, a strategy of customizing the microcantilever’s spring constant according to the sample was proposed based on structure-correlated mechanics. As a proof-of concept, three FONPs with spring constants varying from 0.421 N m −1 to 52.6 N m −1 by more than two orders of magnitude were prepared. The highest microforce sensitivity was 54.5 nm μ N −1 and the detection limit was 2.1 nN. The Young’s modulus of heterogeneous soft materials, such as polydimethylsiloxane, muscle tissue of living mice, onion cells, and MCF-7 cells, were successfully measured, which validating the broad applicability of this method. Our strategy provides a universal protocol for directly programming fiber-optic AFMs. Moreover, this method has no special requirements for the size and shape of living biological samples, which is infeasible when using commercial AFMs. FONP has made substantial progress in realizing basic biological discoveries, which may create new biomedical applications that cannot be realized by current AFMs. A miniature fiber optical nanomechanical probe (FONP) can be used to detect the mechanical properties of single cells and in vivo tissue measurements is demonstrated. The FONP is developed by programming a microcantilever probe on the end face of a single-mode fiber using femtosecond laser 3D printing. A strategy of customizing the microcantilever’s spring constant according to the sample based on structure-correlated mechanics is proposed and the stiffness of FONP is adjustable. The FONPs can operate in air/liquids and show ultra-high force resolution, whose highest microforce sensitivity and detection limit are 54.5 nm μ N −1 , 2.1 nN respectively. The FONPs provide a universal protocol for directly programming fiber-optic AFMs and make substantial progress in realizing basic biological discoveries

Quantum computation requires many qubits that can be coherently controlled and coupled to each other 1 . Qubits that are defined using lithographic techniques have been suggested to enable the development of scalable quantum systems because they can be implemented using semiconductor fabrication technology 2 – 5 . However, leading solid-state approaches function only at temperatures below 100 millikelvin, where cooling power is extremely limited, and this severely affects the prospects of practical quantum computation. Recent studies of electron spins in silicon have made progress towards a platform that can be operated at higher temperatures by demonstrating long spin lifetimes 6 , gate-based spin readout 7 and coherent single-spin control 8 . However, a high-temperature two-qubit logic gate has not yet been demonstrated. Here we show that silicon quantum dots can have sufficient thermal robustness to enable the execution of a universal gate set at temperatures greater than one kelvin. We obtain single-qubit control via electron spin resonance and readout using Pauli spin blockade. In addition, we show individual coherent control of two qubits and measure single-qubit fidelities of up to 99.3 per cent. We demonstrate the tunability of the exchange interaction between the two spins from 0.5 to 18 megahertz and use it to execute coherent two-qubit controlled rotations. The demonstration of ‘hot’ and universal quantum logic in a semiconductor platform paves the way for quantum integrated circuits that host both the quantum hardware and its control circuitry on the same chip, providing a scalable approach towards practical quantum information processing. Lithographically defined qubits are shown to support full two-qubit logic at temperatures above one kelvin by using electron spin states in silicon quantum dots.

The application of hydrogels in nanophotonics has been restricted due to their low fabrication feasibility and refractive index. Nevertheless, their elasticity and strength are attractive properties for use in flexible, wearable-devices, and their swelling characteristics in response to the relative humidity highlight their potential for use in tunable nanophotonics. We investigate the use of nanostructured polyvinyl alcohol (PVA) using a one-step nanoimprinting technique for tunable and erasable optical security metasurfaces with multiplexed structural coloration and metaholography. The resolution of the PVA nanoimprinting reaches sub-100 nm, with aspect ratios approaching 10. In response to changes in the relative humidity, the PVA nanostructures swell by up to ~35.5%, providing precise wavefront manipulation of visible light. Here, we demonstrate various highly-secure multiplexed optical encryption metasurfaces to display, hide, or destroy encrypted information based on the relative humidity both irreversibly and reversibly. PVA is a hydrogel that has attractive swelling properties for use in tunable photonic applications. Here, the authors exploit PVA with nanoimprint lithography to realize multiplexed optical encryption metasurfaces to display, hide, and destroy encrypted information.

At the interface of classical and quantum physics, the Maxwell and Schrödinger equations describe how optical fields drive and control electronic phenomena to enable lightwave electronics at terahertz or petahertz frequencies and on ultrasmall scales 1 – 5 . The electric field of light striking a metal interacts with electrons and generates light–matter quasiparticles, such as excitons 6 or plasmons 7 , on an attosecond timescale. Here we create and image a quasiparticle of topological plasmonic spin texture in a structured silver film. The spin angular momentum components of linearly polarized light interacting with an Archimedean coupling structure with a designed geometric phase generate plasmonic waves with different orbital angular momenta. These plasmonic fields undergo spin–orbit interaction and their superposition generates an array of plasmonic vortices. Three of these vortices can form spin textures that carry non-trivial topological charge 8 resembling magnetic meron quasiparticles 9 . These spin textures are localized within a half-wavelength of light, and exist on the timescale of the plasmonic field. We use ultrafast nonlinear coherent photoelectron microscopy to generate attosecond videos of the spatial evolution of the vortex fields; electromagnetic simulations and analytic theory confirm the presence of plasmonic meron quasiparticles. The quasiparticles form a chiral field, which breaks the time-reversal symmetry on a nanometre spatial scale and a 20-femtosecond timescale (the ‘nano-femto scale’). This transient creation of non-trivial spin angular momentum topology pertains to cosmological structure creation and topological phase transitions in quantum matter 10 – 12 , and may transduce quantum information on the nano-femto scale 13 , 14 . Topological plasmonic spin textures are excited by shining light on a structured silver film, and imaging defines how these quasiparticle field and spin textures evolve on the nanometre and femtosecond scales.

A pilot study on laser 3D printing of inorganic free-form micro-optics is experimentally validated. Ultrafast laser direct-write (LDW) nanolithography is employed for structuring hybrid organic-inorganic material SZ2080TM followed by high-temperature calcination post-processing. The combination allows the production of 3D architectures and the heat-treatment results in converting the material to inorganic substances. The produced miniature optical elements are characterized and their optical performance is demonstrated. Finally, the concept is validated for manufacturing compound optical components such as stacked lenses. This is an opening for new directions and applications of laser-made micro-optics under harsh conditions such as high intensity radiation, temperature, acidic environment, pressure variations, which include open space, astrophotonics, and remote sensing.

Extreme ultraviolet (EUV) lithography is currently entering high-volume manufacturing to enable the continued miniaturization of semiconductor devices. The required EUV light, at 13.5 nm wavelength, is produced in a hot and dense laser-driven tin plasma. The atomic origins of this light are demonstrably poorly understood. Here we calculate detailed tin opacity spectra using the Los Alamos atomic physics suite ATOMIC and validate these calculations with experimental comparisons. Our key finding is that EUV light largely originates from transitions between multiply-excited states, and not from the singly-excited states decaying to the ground state as is the current paradigm. Moreover, we find that transitions between these multiply-excited states also contribute in the same narrow window around 13.5 nm as those originating from singly-excited states, and this striking property holds over a wide range of charge states. We thus reveal the doubly magic behavior of tin and the origins of the EUV light. Extreme ultraviolet (EUV) light is entering use in nanolithography. Here the authors discuss experimental and theoretical results about the prominent role of multiply-excited states in highly charged tin ions in the mechanism of EUV light emission from laser-produced plasma.

Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance for advancing nanoscience and nanotechnology. While the capability of current complementary metal-oxide semiconductor (CMOS) chip manufacturing can produce structures on the sub-10 nm scale, many emerging applications, such as nano-optics, biosensing, and quantum devices, also require ultrasmall features down to single digital nanometers. In these emerging applications, CMOS-based manufacturing methods are currently not feasible or appropriate due to the considerations of usage cost, material compatibility, and exotic features. Therefore, several specific methods have been developed in the past decades for different applications. In this review, we attempt to give a systematic summary on sub-10 nm fabrication methods and their related applications. In the first and second parts, we give a brief introduction of the background of this research topic and explain why sub-10 nm fabrication is interesting from both scientific and technological perspectives. In the third part, we comprehensively summarize the fabrication methods and classify them into three main approaches, including lithographic, mechanics-enabled, and post-trimming processes. The fourth part discusses the applications of these processes in quantum devices, nano-optics, and high-performance sensing. Finally, a perspective is given to discuss the challenges and opportunities associated with this research topic.

Use of the microcantilever in an atomic force microscope (AFM) that has been enhanced with a diamond abrasive grain has emerged as a powerful nanolithography technique. Vibration-assisted mechanical nanolithography, particularly when using self-excited oscillations generated by the microcantilever, enhances machining efficiency, and the machining depth can be controlled conveniently by manipulating the microcantilever’s steady-state amplitude. In this research, the formation mechanism of the machined grooves is investigated. Two machining modes are proposed: one involves the impacts of the diamond abrasive grain equipped on the microcantilever’s tip when used as the formation tool, while the other relies on pressing and rubbing of the diamond abrasive grain. Furthermore, effective control of the machining depth in both machining modes via amplitude manipulation is proposed theoretically. Mechanical nanolithography experiments are performed using a redesigned microcantilever, and the machining mode is determined by observing the new machining tool’s vibration profile during the machining process. As a result, under reduced pressing loads, grooves are formed by the tool’s impacts, whereas when the pressing load exceeds a threshold, the sample surface is pressed and rubbed by the diamond abrasive grain. Furthermore, the effectiveness of machining depth control through amplitude manipulation is demonstrated experimentally.