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Subwavelength optical resonators made of high-index dielectric materials provide efficient ways to manipulate light at the nanoscale through mode interferences and enhancement of both electric and magnetic fields. Such Mie-resonant dielectric structures have low absorption, and their functionalities are limited predominantly by radiative losses. We implement a new physical mechanism for suppressing radiative losses of individual nanoscale resonators to engineer special modes with high quality factors: optical bound states in the continuum (BICs). We demonstrate that an individual subwavelength dielectric resonator hosting a BIC mode can boost nonlinear effects increasing second-harmonic generation efficiency. Our work suggests a route to use subwavelength high-index dielectric resonators for a strong enhancement of light–matter interactions with applications to nonlinear optics, nanoscale lasers, quantum photonics, and sensors.

An X-band low-phase noise planar oscillator employing the substrate integrated waveguide (SIW) active resonator is demonstrated. By compensating the losses in the SIW cavity with an active feedback loop, the Q-factor of the SIW active resonator is greatly improved. The measured results show a loaded Q-factor of 1569 and unloaded Q-factor of 8782, which is very high among other planar resonators. A simplified generalised phase noise condition and its optimisation approach are proposed for the low-phase noise oscillator design. To validate the proposed optimisation approach, experimental prototypes of oscillators using different design parameters and resonators are fabricated. The measured results show that the optimised SIW active resonator oscillator possesses low-phase noise of −109.2 dBc/Hz at 100 kHz at X-band, which is 17 and 9 dB better than the microstrip resonator oscillator and SIW passive resonator oscillator, and is comparable with the dielectric resonator oscillator measured in this study.

Ultrasound detectors use high-frequency sound waves to image objects and measure distances, but the resolution of these readings is limited by the physical dimensions of the detecting element. Point-like broadband ultrasound detection can greatly increase the resolution of ultrasonography and optoacoustic (photoacoustic) imaging 1 , 2 , but current ultrasound detectors, such as those used for medical imaging, cannot be miniaturized sufficiently. Piezoelectric transducers lose sensitivity quadratically with size reduction 3 , and optical microring resonators 4 and Fabry–Pérot etalons 5 cannot adequately confine light to dimensions smaller than about 50 micrometres. Micromachining methods have been used to generate arrays of capacitive 6 and piezoelectric 7 transducers, but with bandwidths of only a few megahertz and dimensions exceeding 70 micrometres. Here we use the widely available silicon-on-insulator technology to develop a miniaturized ultrasound detector, with a sensing area of only 220 nanometres by 500 nanometres. The silicon-on-insulator-based optical resonator design provides per-area sensitivity that is 1,000 times higher than that of microring resonators and 100,000,000 times better than that of piezoelectric detectors. Our design also enables an ultrawide detection bandwidth, reaching 230 megahertz at −6 decibels. In addition to making the detectors suitable for manufacture in very dense arrays, we show that the submicrometre sensing area enables super-resolution detection and imaging performance. We demonstrate imaging of features 50 times smaller than the wavelength of ultrasound detected. Our detector enables ultra-miniaturization of ultrasound readings, enabling ultrasound imaging at a resolution comparable to that achieved with optical microscopy, and potentially enabling the development of very dense ultrasound arrays on a silicon chip. The widely available silicon-on-insulator technology is used to develop a miniaturized ultrasound detector, which is 200 times smaller than the wavelengths of sound that it can detect.

Cavity design is crucial for single-mode semiconductor lasers such as the ubiquitous distributed feedback and vertical-cavity surface-emitting lasers. By recognizing that both of these optical resonators feature a single mid-gap mode localized at a topological defect in the one-dimensional lattice, we upgrade this topological cavity design concept into two dimensions using a honeycomb photonic crystal with a vortex Dirac gap by applying the generalized Kekulé modulations. We theoretically predict and experimentally show on a silicon-on-insulator platform that the Dirac-vortex cavities have scalable mode areas, arbitrary mode degeneracies, vector-beam vertical emission and compatibility with high-index substrates. Moreover, we demonstrate the unprecedentedly large free spectral range, which defies the universal inverse relation between resonance spacing and resonator size. We believe that our topological micro-resonator will be especially useful in applications where single-mode behaviour is required over a large area, such as the photonic-crystal surface-emitting laser.Surface emission from a topological mid-gap cavity shows large free spectral range and arbitrary mode degeneracy.

We investigate elastic periodic structures characterized by topologically nontrivial bandgaps supporting backscattering suppressed edge waves. These edge waves are topologically protected and are obtained by breaking inversion symmetry within the unit cell. Examples for discrete one and two-dimensional lattices elucidate the concept and illustrate parallels with the quantum valley Hall effect. The concept is implemented on an elastic plate featuring an array of resonators arranged according to a hexagonal topology. The resulting continuous structures have non-trivial bandgaps supporting edge waves at the interface between two media with different topological invariants. The topological properties of the considered configurations are predicted by unit cell and finite strip dispersion analyses. Numerical simulations demonstrate edge wave propagation for excitation at frequencies belonging to the bulk bandgaps. The considered plate configurations define a framework for the implementation of topological concepts on continuous elastic structures of potential engineering relevance.

Mechanical resonators are important components of devices that range from gravitational wave detectors to cellular telephones. They serve as high-performance transducers, sensors and filters by offering low dissipation, tunable coupling to diverse physical systems, and compatibility with a wide range of frequencies, materials and fabrication processes. Systems of mechanical resonators typically obey reciprocity, which ensures that the phonon transmission coefficient between any two resonators is independent of the direction of transmission 1 , 2 . Reciprocity must be broken to realize devices (such as isolators and circulators) that provide one-way propagation of acoustic energy between resonators. Such devices are crucial for protecting active elements, mitigating noise and operating full-duplex transceivers. Until now, nonreciprocal phononic devices 3 – 11 have not simultaneously combined the features necessary for robust operation: strong nonreciprocity, in situ tunability, compact integration and continuous operation. Furthermore, they have been applied only to coherent signals (rather than fluctuations or noise), and have been realized exclusively in travelling-wave systems (rather than resonators). Here we describe a scheme that uses the standard cavity-optomechanical interaction to produce robust nonreciprocal coupling between phononic resonators. This scheme provides about 30 decibels of isolation in continuous operation and can be tuned in situ simply via the phases of the drive tones applied to the cavity. In addition, by directly monitoring the dynamics of the resonators we show that this nonreciprocity can control thermal fluctuations, and that this control represents a way to cool phononic resonators. A cavity optomechanical scheme produces robust nonreciprocal coupling between phononic resonators and is used to control the resonators’ thermal fluctuations.

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

A U-shape cavity including the microring resonator with a radius of 3 µm has been modeled and studied for the throughput and drop output power enhancement of the microring resonator. We have obtained the maximum output power of the silicon microring resonator by varying the bandgap between the microring and the coupled bus waveguides. The outputs can be further affected by using the different semiconductor materials such as GaAs and InAs as core waveguides, which show significant power enhancement at the throughput and drop, respectively. A time delay of 347 fs is realized for the generated results, which is occurred due to the different light propagation patch.

According to quantum mechanics, a harmonic oscillator can never be completely at rest. Even in the ground state, its position will always have fluctuations, called the zero-point motion. Although the zero-point fluctuations are unavoidable, they can be manipulated. Using microwave frequency radiation pressure, we have manipulated the thermal fluctuations of a micrometer-scale mechanical resonator to produce a stationary quadrature-squeezed state with a minimum variance of 0.80 times that of the ground state. We also performed phase-sensitive, back-action evading measurements of a thermal state squeezed to 1.09 times the zero-point level. Our results are relevant to the quantum engineering of states of matter at large length scales, the study of decoherence of large quantum systems, and for the realization of ultrasensitive sensing of force and motion.

Nano- and micromechanical solid-state quantum devices have become a focus of attention. Reliably generating nonclassical states of their motion is of interest both for addressing fundamental questions about macroscopic quantum phenomena and for developing quantum technologies in the domains of sensing and transduction. We used quantum optical control techniques to conditionally generate single-phonon Fock states of a nanomechanical resonator. We performed a Hanbury Brown and Twiss–type experiment that verified the nonclassical nature of the phonon state without requiring full state reconstruction. Our result establishes purely optical quantum control of a mechanical oscillator at the single-phonon level.