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A comprehensive overview of PowderMEMS—a novel back-end-of-line-compatible microfabrication technology—is presented in this paper. The PowderMEMS process solidifies micron-sized particles via atomic layer deposition (ALD) to create three-dimensional microstructures on planar substrates from a wide variety of materials. The process offers numerous degrees of freedom for the design of functional MEMSs, such as a wide choice of different material properties and the precise definition of 3D volumes at the substrate level, with a defined degree of porosity. This work details the characteristics of PowderMEMS materials as well as the maturity of the fabrication technology, while highlighting prospects for future microdevices. Applications of PowderMEMS in the fields of magnetic, thermal, optical, fluidic, and electrochemical MEMSs are described, and future developments and challenges of the technology are discussed.

Recent work demonstrates that processes of stress release in prestrained elastomeric substrates can guide the assembly of sophisticated 3D micro/nanostructures in advanced materials. Reported application examples include soft electronic components, tunable electromagnetic and optical devices, vibrational metrology platforms, and other unusual technologies, each enabled by uniquely engineered 3D architectures. A significant disadvantage of these systems is that the elastomeric substrates, while essential to the assembly process, can impose significant engineering constraints in terms of operating temperatures and levels of dimensional stability; they also prevent the realization of 3D structures in freestanding forms. Here, we introduce concepts in interfacial photopolymerization, nonlinear mechanics, and physical transfer that bypass these limitations. The results enable 3D mesostructures in fully or partially freestanding forms, with additional capabilities in integration onto nearly any class of substrate, from planar, hard inorganic materials to textured, soft biological tissues, all via mechanisms quantitatively described by theoretical modeling. Illustrations of these ideas include their use in 3D structures as frameworks for templated growth of organized lamellae from AgCl–KCl eutectics and of atomic layers of WSe₂ from vapor-phase precursors, as open-architecture electronic scaffolds for formation of dorsal root ganglion (DRG) neural networks, and as catalyst supports for propulsive systems in 3D microswimmers with geometrically controlled dynamics. Taken together, these methodologies establish a set of enabling options in 3D micro/nanomanufacturing that lie outside of the scope of existing alternatives.

Recent work demonstrates that processes of stress release in prestrained elastomeric substrates can guide the assembly of sophisticated 3D micro/nanostructures in advanced materials. Reported application examples include soft electronic components, tunable electromagnetic and optical devices, vibrational metrology platforms, and other unusual technologies, each enabled by uniquely engineered 3D architectures. A vast disadvantage of these systems is that the elastomeric substrates, while essential to the assembly process, can impose significant engineering constraints in terms of operating temperatures and levels of dimensional stability; they also prevent the realization of 3D structures in freestanding forms. In this work, we introduce concepts in interfacial photopolymerization, nonlinear mechanics, and physical transfer that bypass these limitations. The results enable 3D mesostructures in fully or partially freestanding forms, with additional capabilities in integration onto nearly any class of substrate, from planar, hard inorganic materials to textured, soft biological tissues, all via mechanisms quantitatively described by theoretical modeling. Illustrations of these ideas include their use in 3D structures as frameworks for templated growth of organized lamellae from AgCl–KCl eutectics and of atomic layers of WSe2from vapor-phase precursors, as open-architecture electronic scaffolds for formation of dorsal root ganglion (DRG) neural networks, and as catalyst supports for propulsive systems in 3D microswimmers with geometrically controlled dynamics. Taken together, these methodologies establish a set of enabling options in 3D micro/nanomanufacturing that lie outside of the scope of existing alternatives.

In the intricate process of maskless localized electrodeposition (MLED) for fabricating three-dimensional microstructures, specifically nickel micro-columns with an aspect ratio of 7:1, magnetic fields of defined strength were employed, oriented both parallel and anti-parallel to the electric field. The aim was to achieve nanocrystalline microstructures and elevated deposition rates. A detailed comparative analysis was conducted to examine the volumetric deposition rate, surface morphology, and grain size of the MLED nickel crystal 3D microstructures, both in the absence and presence of the two magnetic field directions, facilitated by a self-assembled experimental setup. The results indicate that the anti-parallel magnetic field significantly boosts the volumetric deposition rate to a notable 19,050.65 μm3/s and refines the grain size, achieving an average size of 24.82 nm. Conversely, the parallel magnetic field is found to enhance the surface morphology of the MLED nickel crystal 3D microstructure.

In the manufacture of integrated circuits (ICs), copper is used primarily as the multilevel interconnect material, which is manufactured with a dual damascene technique utilizing chemical mechanical polishing (CMP) to planarize overburdened materials. However, there are many challenges for copper CMP technique to produce a surface with a superior planarity and local device surface finish with minimal dishing and erosion while achieving uniform copper blanket film under specific thickness. Considering these challenges, this study pioneered the development of a three-dimensional microstructural model for polishing pads, which is based on image processing algorithms to construct the porous feature structure of polishing pad in conjunction with generating a layer of surface asperities, allowing for an accurate assessment of the effect of downward pressure during CMP on the microstructure of polishing pads. Moreover, this study also develop the new calibration method based on finite element simulation method for determining the mechanism of material removal by abrasive particles as well as the passivation of thin copper blanket film in polishing slurry. Results of this study include not only investigations of the copper blanket wafer’s surface roughness after CMP process but also the development of a new methodology of calibrating the material removal rates (MRRs) validated through comparison with CMP experiments. These findings can be further applied for developing CMP process model, and for advanced applications.

Loess has a loose metastable structure, which is not difficult to destroy under loading. As the core of loess structures, the current main research directions of loess engineering properties are studying their microscopic behaviours and then interpreting and predicting macroscopic mechanical properties. In this study, based on the analysis of the basic physical properties of loess samples from seven different places, each sample is scanned using X-ray with continuous slice computed tomography (CT), and the three-dimensional microstructure of loess samples is established. According to the computer graphics method, each particle is equivalent to an ellipsoid, and the flattening rate and elongation rate of particles in each sample are quantitatively counted. Taking the particle size distribution (PSD) and shape parameters (flatness and elongation) of each sample as the control factors for generating discrete element method (DEM) samples, a series of triaxial compression simulation tests are conducted, and the microscopic behaviours of each sample are studied within the entire test framework. Comparing the results of seven different samples, it is shown that both PSD and particle shape have effects on the stress–strain relationship, dry density and normal contact force of loess samples. Most of the sand particles (> 0.075 mm) are flat particles, while the clay particles (< 0.005 mm) are mainly near spheres. When the volume fraction of sand particles is large, the dry density of the sample is the lowest. However, when the content of near-spherical clay particles is large and the PSD is good, the average coordination value is large, which shows that it has a strong normal contact force and thus a higher shear strength.

In this paper, we aim at characterizing three different cast iron alloys and their microstructural features, namely lamellar, compacted and nodular graphite iron. The characterization of microscopic features is essential for the development of methods to optimize the behavior of cast iron alloys; e.g. maximize thermal dissipation and/or maximize ductility while maintaining strength. The variation of these properties is commonly analyzed by metallography on two-dimensional representations of the alloy. However, more precise estimates of the morphologies and material characteristics is obtained by three-dimensional reconstruction of microstructures. The use of X-ray microtomography provides an excellent tool to generate high resolution three-dimensional microstructure images. The characteristics of the graphite constituent in the microstructure, including the size, shape and connectivity, were analyzed for the different cast iron alloys. It was observed that the lamellar and compacted graphite iron alloys have relatively large connected graphite morphologies, as opposed to ductile iron where the graphite is present as nodules. The results of the characterization for the different alloys were ultimately used to generate finite element models.

High-Energy Diffraction Microscopy (HEDM) is a 3-d X-ray characterization method that is uniquely suited to measuring the evolving micro-mechanical state and microstructure of polycrystalline materials during in situ processing. The near-field and far-field configurations provide complementary information; orientation maps computed from the near-field measurements provide grain morphologies, while the high angular resolution of the far-field measurements provides intergranular strain tensors. The ability to measure these data during deformation in situ makes HEDM an ideal tool for validating micro-mechanical deformation models that make their predictions at the scale of individual grains. Crystal Plasticity Finite Element Models (CPFEM) are one such class of micro-mechanical models. While there have been extensive studies validating homogenized CPFEM response at a macroscopic level, a lack of detailed data measured at the level of the microstructure has hindered more stringent model validation efforts. We utilize an HEDM dataset from an alpha-titanium alloy (Ti-7Al), collected at the Advanced Photon Source, Argonne National Laboratory, under in situ tensile deformation. The initial microstructure of the central slab of the gage section, measured via near-field HEDM, is used to inform a CPFEM model. The predicted intergranular stresses for 39 internal grains are then directly compared to data from 4 far-field measurements taken between ~4 and ~80 pct of the macroscopic yield strength. The evolution of the elastic strain state from the CPFEM model and far-field HEDM measurements up to incipient yield are shown to be in good agreement, while residual stress at the individual grain level is found to influence the intergranular stress state even upon loading. Implications for application of such an integrated computational/experimental approach to phenomena such as fatigue are discussed.

Summary We investigated age- and gender-related variation of both cortical and trabecular microstructure in human femoral neck. We found that age-related change of cortical porosity is more noticeable than that of trabecular parameter. Our data may help to gain more insight into the potential mechanism of osteoporotic femoral neck fractures. Introduction Variations in the microstructure of cortical and trabecular bone contribute to decreased bone strength. Age- and gender-related changes in cortical and trabecular microstructure of femoral neck is unclear. The aim of this study was to identify three-dimensional (3D) microstructural changes of both cortical and trabecular bone simultaneously in human femoral neck with age and gender, using micro-computed tomography (micro-CT). We hypothesized that there would be differences in age-related changes of cortical and trabecular bone for both women and men. Methods We used 56 femoral necks of 28 women and men (57-98 years of age) from a Japanese population. The subjects were chosen to give an even age and gender distribution. Both women and men were divided into three age groups: middle (57-68 years), old (72-82 years), and elderly (87-98 years) groups. We examined cortical bone specimen from the inferior sector of femoral neck and trabecular bone specimen from the middle of femoral neck using micro-CT and 3D bone analysis software. Results Cortical thickness (Ct.Th) decreased by 10-15%, cortical porosity (Ca.V/TV) almost doubled, and canal diameter (Ca.Dm) increased by 65-77% between the middle-aged and elderly groups for both women and men. The trabecular bone volume fraction (BV/TV) decreased by around 20%; trabecular thickness (Tb.Th), trabecular number (Tb.N), and connectivity density (Conn.D) decreased; and trabecular separation (Tb.Sp) and structure model index (SMI) increased with age for both women and men. As compared with women, men had higher Ct.Th and BV/TV and lower Ca.V/TV and Ca.Dm among three age groups. There was a significant inverse correlation between Ca.V.TV and BV/TV for both women and men. Conclusion Our findings indicate that Ct.Th and BV/TV decreased, and Ca.V/TV and Ca.Dm increased in femoral neck with age for both women and men. The most obvious age-related change is the increase of Ca.V/TV. The decrease of BV/TV with age is more noticeable than that of Ct.Th. This is the first study that has provided both cortical and trabecular microstructural data simultaneously in a Japanese sample. These data may help us to gain more insight into the potential mechanism of osteoporotic femoral neck fractures.

On the Loess Plateau of China, the number of projects involving the excavation of mountains and the filling of valleys to create new land is rising. The loess excavated from the mountain is directly used as building material. After being filled into the valley and remolded, it serves as the foundation for overlying structures. However, significant differences in mechanical behavior exist between intact and remolded loess, leading to various issues such as differential settlement. Understanding the microstructure of loess is essential for improving our comprehension of its macro-level hydrological and mechanical behavior. Due to the inherent limitation of the conventional methods (e.g., scanning electron microscopy and mercury intrusion porosimetry) for microstructure investigation, an in-depth understanding of the three-dimensional (3D) microstructural differences between intact and remolded loess remains elusive. To address this gap, this study employs advanced X-ray micro-computed tomography (micro-CT) to investigate the 3D microstructure of both intact and remolded loess from two typical man-made new land creation projects. The three-dimensional microstructures are segmented into a series of cubes of varying dimensions to identify the structure’s representative volume element (RVE) and assess the uniformity of both loess types. The pore network of the RVE is quantitatively analyzed to characterize the microstructure. The results reveal significant disparities between the microstructure of intact and remolded loess, particularly in terms of uniformity, pore size distribution, and pore connectivity. Remolded loess exhibits a denser structure with poorer pore connectivity and greater heterogeneity compared to intact loess. These microstructural differences are attributed to the distinct formation processes of the two types of loess.