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Adiabatic embedment of nanomechanical resonators in photonic microring cavities
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Adiabatic embedment of nanomechanical resonators in photonic microring cavities
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Paper
Adiabatic embedment of nanomechanical resonators in photonic microring cavities
2014
Overview
We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of the mechanical beam.
Publisher
Cornell University Library, arXiv.org
Subject
