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3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology
by
Juhel, Marc
, Estivill, Robert
, Grenier, Adeline
, Printemps, Tony
, Caubet, Pierre
, Gregoire, Magali
, Blavette, Didier
in
A13 Advancing Data Collection and Analysis for Atom Probe Tomography
/ Analytical and Instrumentation Science Symposia
/ Boron
/ CMOS
/ Electrons
/ Microscopy
/ Tomography
2015
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3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology
by
Juhel, Marc
, Estivill, Robert
, Grenier, Adeline
, Printemps, Tony
, Caubet, Pierre
, Gregoire, Magali
, Blavette, Didier
in
A13 Advancing Data Collection and Analysis for Atom Probe Tomography
/ Analytical and Instrumentation Science Symposia
/ Boron
/ CMOS
/ Electrons
/ Microscopy
/ Tomography
2015
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Do you wish to request the book?
3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology
by
Juhel, Marc
, Estivill, Robert
, Grenier, Adeline
, Printemps, Tony
, Caubet, Pierre
, Gregoire, Magali
, Blavette, Didier
in
A13 Advancing Data Collection and Analysis for Atom Probe Tomography
/ Analytical and Instrumentation Science Symposia
/ Boron
/ CMOS
/ Electrons
/ Microscopy
/ Tomography
2015
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3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology
Journal Article
3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology
2015
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Publisher
Cambridge University Press,Oxford University Press
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