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Design and experiment of 3-DOF micro-nano platform based on active-passive composite decoupling
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Design and experiment of 3-DOF micro-nano platform based on active-passive composite decoupling
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Journal Article
Design and experiment of 3-DOF micro-nano platform based on active-passive composite decoupling
2025
Overview
The 3-DOF micro-nano positioning stage employing active-passive hybrid decoupling is experimentally studied. The flexible amplification mechanism integrating semi-compound bridge-type, lever, and steering configurations is proposed to achieve passive decoupling of the positioning stage. Active decoupling is accomplished through a Z-axis compensation mechanism. The experiment shows that the micro-nano positioning platform achieves the displacement of 85.7 μm × 86.6 μm × 8.2 μm, with X-axis and Y-axis coupling errors both below 0.4%. The Z-axis compensation mechanism effectively performs active compensation for loads up to 400 g. The developed positioning stage exhibits an enlarged workspace and enhanced anti-coupling performance compared to conventional designs.
Publisher
IOP Publishing
Subject
