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Self-constrained sintering of Al2O3/glass/Al2O3 ceramics by glass infiltration
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Self-constrained sintering of Al2O3/glass/Al2O3 ceramics by glass infiltration
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Journal Article
Self-constrained sintering of Al2O3/glass/Al2O3 ceramics by glass infiltration
2009
Overview
Though need for precise alignment of interlayer patterning in LTCC application, there have been few reports about zero-shrinkage sintering techniques. In this study, ceramic substrate with minimal
x
–
y
shrinkage was prepared by glass infiltration method with ‘Al
2
O
3
/glass/Al
2
O
3
’ structure. Glass infiltration into alumina particle layer was observed with variation of both sintering temperature (700 ≤
T
sint.
≤ 900 °C) and alumina particle size distribution (0.5 ≤
D
50
≤ 1.8 μm). Since glass had low viscosity enough to infiltrate at 700 °C, infiltration started at that temperature and infiltrated up to 20 μm or so with temperature increase, but infiltration depth did not increase noticeably above 750 °C. Based on these results, when sintered at 900 °C with controlled sheet thickness of both glass and alumina, the shrinkage in
x
–
y
direction was calculated as less than 0.2%, with 40% in
z
direction. Dielectric constant (
ɛ
r
) measured 6.19 with quality factor (
Q
) of 552 at 1 GHz of frequency. From these results, it is thought that zero-shrinkage ceramic substrates would be obtained without de-lamination.
Publisher
Springer US,Springer Nature B.V
