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Precision Design of Probe Station Calibration Device for Wafer Test System
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Journal Article
Precision Design of Probe Station Calibration Device for Wafer Test System
2023
Overview
Aiming at the problem that the probe station of the current wafer test system cannot be measured, a calibration device for the playing table of the wafer test system is designed. The device fully considers the structure of the probe station of the wafer test system and uses a laser interferometer to realize the calibration of the probe station of the wafer test system. Various error sources of the calibration device are analyzed, and errors are allocated according to the device’s technical indicators. The calculation results show that the maximum allowable error of the designed wafer test system probe station calibration device is 0.764μm, which is in line with the technical specifications.
Publisher
IOP Publishing
Subject
