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3D Multilayered Metamaterials with High Plasmonic Hotspot Density for Surface—Enhanced Raman Spectroscopy
3D Multilayered Metamaterials with High Plasmonic Hotspot Density for Surface—Enhanced Raman Spectroscopy
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3D Multilayered Metamaterials with High Plasmonic Hotspot Density for Surface—Enhanced Raman Spectroscopy
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3D Multilayered Metamaterials with High Plasmonic Hotspot Density for Surface—Enhanced Raman Spectroscopy
3D Multilayered Metamaterials with High Plasmonic Hotspot Density for Surface—Enhanced Raman Spectroscopy

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3D Multilayered Metamaterials with High Plasmonic Hotspot Density for Surface—Enhanced Raman Spectroscopy
3D Multilayered Metamaterials with High Plasmonic Hotspot Density for Surface—Enhanced Raman Spectroscopy
Journal Article

3D Multilayered Metamaterials with High Plasmonic Hotspot Density for Surface—Enhanced Raman Spectroscopy

2023
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Overview
Three-dimensional (3D) plasmonic metamaterials have become a trend in the application of nanophotonic devices. In this paper, a convenient and inexpensive method for the design of 3D multilayer plasmonic metamaterials is constructed using a one-step self-shielded reactive-ion-etching process (OSRP) and a thermal evaporation system, which provides an efficient and low-cost method for the preparation of surface-enhanced Raman spectroscopy (SERS) substrates. The near-field enhancement of the 3D plasmonic metamaterials provides highly efficient electromagnetic resonance, and highly sensitive and uniform SERS sensing capabilities. The SERS detection results of rhodamine B (Rh. B) and rhodamine 6G (R6G) on this substrate show that the detection limit could reach 10–13 mol/L, and the signal could give expression to excellent uniform stability. The results show that high sensitivity and high robustness SERS substrates can be prepared with high efficiency and low cost.