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A Comparative Study on the Anti-Friction Performance of Amorphous Silicon Films Enhanced by WS2 Nanoflakes
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A Comparative Study on the Anti-Friction Performance of Amorphous Silicon Films Enhanced by WS2 Nanoflakes
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Journal Article
A Comparative Study on the Anti-Friction Performance of Amorphous Silicon Films Enhanced by WS2 Nanoflakes
2023
Overview
Silicon has been irreplaceable for a long time due to its well-estiblished design and fabrication in the field of Micro-Electro-Mechanical System (MEMS). However, it has poor tribological properties, which limits the further application of actuators (with relative motion) based MEMS. First, the amorphous silicon (a-Si) coatings were prepared on silicon substrates and high-speed steel (HSS) substrates by plasma enhanced chemical vapor deposition, and the relationships between mechanical properties and tribological performance were also systematically discussed. The wear rate of a-Si film on HSS has decreased significantly (decreased by 81.55%) compared with a-Si coating on silicon, which can be attributed to the larger elastic modulus and hardness of a-Si on the HSS matrix. Then, tungsten disulfide (WS
2
) nanoflake coatings with low interlayer shear stress were successfully prepared on the amorphous silicon (a-Si) coatings by the drop-casting method, forming a WS
2
+ a-Si coating to enhance the tribological properties. Combined with first-principles simulations and the characterization of the wear scar morphology, the macro-scale sliding friction of this composite coating against the Al
2
O
3
ceramic ball was investigated in ambient air. The results indicated that the introduction of WS
2
nanoflakes reduces the coefficient of friction (CoF) from 0.5 to 0.08. The reduction in CoF could be attributed to the in-situ formation of WS
2
lubricating transfer film on the wear scar of the ball and the WS
2
heterogeneous interface on a-Si film, leading to asymmetric contact between the friction pairs, which in turn triggers low and stable friction.
Publisher
Springer Netherlands,Springer Nature B.V
