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Operating Cost Savings in the Atomic Layer Deposition Process of Ultrathin Electrolyte for Solid Oxide Fuel Cells by Applying Oxygen Plasma
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Operating Cost Savings in the Atomic Layer Deposition Process of Ultrathin Electrolyte for Solid Oxide Fuel Cells by Applying Oxygen Plasma
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Operating Cost Savings in the Atomic Layer Deposition Process of Ultrathin Electrolyte for Solid Oxide Fuel Cells by Applying Oxygen Plasma
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Journal Article
Operating Cost Savings in the Atomic Layer Deposition Process of Ultrathin Electrolyte for Solid Oxide Fuel Cells by Applying Oxygen Plasma
2022
Overview
The impact of operating cost savings in a plasma-enhanced atomic layer deposition (P-ALD) process to fabricate the ultrathin yttria-stabilized zirconia (YSZ) electrolyte for low-temperature solid oxide fuel cells is quantitatively evaluated by comparison with a thermal atomic layer deposition (T-ALD) process considering the two cost factors: (1) operating costs of power consumption and precursor/gas usages and (2) capital costs of plasma generator installations. Because of lower precursor/gas usages and lower power consumption of the P-ALD YSZ process, it is evaluated that the specific operating costs of the P-ALD YSZ process is ~ 47% lower than that of the T-ALD YSZ process. For annual production of 2.6 kW fuel cell systems of 100 units, it is estimated that the cumulative cost savings of the P-ALD YSZ process versus the T-ALD YSZ process amounts to $678,000 in the fifth year.
