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Prismatic Slip in PVT-Grown 4H-SiC Crystals
by
Manning, Ian
, Guo, Jianqiu
, Sanchez, Edward
, Quast, Jeffrey
, Dudley, Michael
, Kim, Jungyu
, Yang, Yu
, Chung, Gilyong
, Raghothamachar, Balaji
in
Characterization and Evaluation of Materials
/ Chemistry and Materials Science
/ Electronics
/ Electronics and Microelectronics
/ Instrumentation
/ Materials Science
/ Optical and Electronic Materials
/ Silicon carbide
/ Single crystals
/ Solid State Physics
2017
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Prismatic Slip in PVT-Grown 4H-SiC Crystals
by
Manning, Ian
, Guo, Jianqiu
, Sanchez, Edward
, Quast, Jeffrey
, Dudley, Michael
, Kim, Jungyu
, Yang, Yu
, Chung, Gilyong
, Raghothamachar, Balaji
in
Characterization and Evaluation of Materials
/ Chemistry and Materials Science
/ Electronics
/ Electronics and Microelectronics
/ Instrumentation
/ Materials Science
/ Optical and Electronic Materials
/ Silicon carbide
/ Single crystals
/ Solid State Physics
2017
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Do you wish to request the book?
Prismatic Slip in PVT-Grown 4H-SiC Crystals
by
Manning, Ian
, Guo, Jianqiu
, Sanchez, Edward
, Quast, Jeffrey
, Dudley, Michael
, Kim, Jungyu
, Yang, Yu
, Chung, Gilyong
, Raghothamachar, Balaji
in
Characterization and Evaluation of Materials
/ Chemistry and Materials Science
/ Electronics
/ Electronics and Microelectronics
/ Instrumentation
/ Materials Science
/ Optical and Electronic Materials
/ Silicon carbide
/ Single crystals
/ Solid State Physics
2017
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Journal Article
Prismatic Slip in PVT-Grown 4H-SiC Crystals
2017
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Overview
Basal plane slip is the most frequently observed deformation mechanism in 4H-type silicon carbon (4H-SiC) single crystals grown by the physical vapor transport (PVT) method. However, it was recently reported that dislocations in such crystals can also glide in prismatic slip systems. In this study, we observed nonuniform distributions of three sets of prismatic dislocations in a commercial 4H-SiC substrate wafer. The nonuniformity is a result of the distribution of resolved shear stress on each prismatic slip system caused by radial thermal gradients in the growing crystal boule. A radial thermal model has been developed to estimate the thermal stress across the entire area of the crystal boule during PVT growth. The model results show excellent agreement with the observations, confirming that radial thermal gradients play a key role in activating prismatic slip in 4H-SiC during bulk growth.
Publisher
Springer US,Springer Nature B.V
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