Asset Details
Do you wish to reserve the book?
Theory and molecular simulations of plasma sputtering, transport and deposition processes
Hey, we have placed the reservation for you!
By the way, why not check out events that you can attend while you pick your title.
Oops! Something went wrong.
Looks like we were not able to place the reservation. Kindly try again later.
Are you sure you want to remove the book from the shelf?
Theory and molecular simulations of plasma sputtering, transport and deposition processes
Do you wish to request the book?
Theory and molecular simulations of plasma sputtering, transport and deposition processes
Please be aware that the book you have requested cannot be checked out. If you would like to checkout this book, you can reserve another copy
We have requested the book for you!
Your request is successful and it will be processed during the Library working hours. Please check the status of your request in My Requests.
Oops! Something went wrong.
Looks like we were not able to place your request. Kindly try again later.
Journal Article
Theory and molecular simulations of plasma sputtering, transport and deposition processes
2023
Overview
The present review provides an overview of the basic theory of sputtering with recent models, focusing in particular on sputtered atom energy distribution functions. Molecular models such as Monte-Carlo, kinetic Monte-Carlo, and classical Molecular Dynamics simulations are presented due to their ability to describe the various processes involved in sputter deposition at the atomic and molecular scale as required. The sputter plasma, the sputtering mechanisms, the transport of sputtered material and its deposition leading to thin film growth can be addressed using these molecular simulations. In all cases, the underlying methodologies and some selected mechanisms are highlighted.
Graphic abstract
Publisher
Springer Berlin Heidelberg,Springer Nature B.V,EDP Sciences
