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Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications
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Journal Article
Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications
2017
Overview
Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.
Publisher
MDPI AG,MDPI
