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On-chip integration of laser-ablated zone plates for detection enhancement of InGaAs bow-tie terahertz detectors
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On-chip integration of laser-ablated zone plates for detection enhancement of InGaAs bow-tie terahertz detectors
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On-chip integration of laser-ablated zone plates for detection enhancement of InGaAs bow-tie terahertz detectors
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Journal Article
On-chip integration of laser-ablated zone plates for detection enhancement of InGaAs bow-tie terahertz detectors
2014
Overview
One order of magnitude detection enhancement of bow-tie-shaped InGaAs-based terahertz detectors by on-chip incorporation of the secondary diffractive optics is reported. Zone plates were produced directly on the bottom surface of 500 µm-thick InP substrate using the direct laser write technique after an array of InGaAs detectors was formed on the front surface of the wafer. Measurements of detected signal dependence on the angle of the incident wave were performed at 0.76 THz and compared with finite-difference time-domain simulation results. Good correlation of the results shows that the observed enhancement is indeed caused by the focusing performance of the zone plate rather than by the exceptional sensitivity of the single detector.
Publisher
The Institution of Engineering and Technology,John Wiley & Sons, Inc
Subject
/ bow–tie‐shaped terahertz detector
/ detected signal dependence measurement
/ diffractive optical elements
/ direct laser write technique
/ finite difference time‐domain analysis
/ finite‐difference time‐domain simulation
/ InGaAs
/ InP
/ magnitude detection enhancement
/ secondary diffractive optics
