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后摩尔时代取代硅的微电子材料——碳纳米管和石墨烯
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Journal Article
后摩尔时代取代硅的微电子材料——碳纳米管和石墨烯
2011
Overview
TN495; 在硅电子材料即将发展到顶峰时,碳纳米管及石墨烯以其优良的导体和半导体性质将成为延续硅材料的主流微电子材料.详述了碳纳米管和石墨烯的结构与电学性质,从而说明其作为微电子材料的优势,列举了在微电子器件构建中已经取得的成果及构建器件的方法,并简述了相应碳纳米管和石墨烯的制备方法.
Publisher
长春理工大学理学院,长春,130022%德州学院化学系,德州,253023
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