Explore the vast range of titles available.

The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope.

A photoacoustic gas detector for SO2 was developed for ship exhaust gas emission monitoring. The basic measurement setup is based on the absorption of electromagnetic radiation of SO2 at 285 nm wavelength. A commercially available ultraviolet (UV) light-emitting diode (LED) is used as the light source and a micro-electro-mechanical system (MEMS) microphone as the detector. In order to achieve the required detection limits in marine applications, a measuring cell which allows an acoustically resonant amplification of the photoacoustic signal was developed and characterized. A limit of detection of 1 ppm was achieved in lab conditions during continuous gas flow. Long-term measurements on a container ship demonstrated the application relevance of the developed system.

The calibration of Micro-Electro-Mechanical System (MEMS) microphones remains a critical challenge due to their miniaturized geometry and sensitivity to non-uniform acoustic fields. This study presents an advanced calibration methodology that integrates Finite Element Method (FEM) simulations with experimental corrections to improve the accuracy of pressure comparison calibrations using active couplers. A key innovation is the incorporation of asymmetric acoustic field analysis, which systematically quantifies and corrects discrepancies arising from cavity geometry, sensor positioning, and resonance effects peculiar of MEMS microphones. The proposed approach significantly reduces measurement uncertainties, especially in the high-frequency range above 5 kHz, where standard calibration techniques face challenges in taking into account localized pressure variations. Furthermore, the implementation of a measurement set-up, which includes the insert voltage technique, allows for an accurate assessment of the preamplifier gain and minimizes systematic errors. Experimental validation shows that the refined calibration methodology produces highly reliable correction values, ensuring a robust performance over a wide frequency range (20 Hz–20 kHz). These advances establish a rigorous framework for standardizing the calibration of MEMS microphones, strengthening their applicability in acoustic monitoring, sound source localization, and environmental sensing.

Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS) is a technique in which the sound wave is detected by a quartz tuning fork (QTF). It enables particularly high specificity with respect to the excitation frequency and is well known for an extraordinarily sensitive analysis of gaseous samples. We have developed the first photoacoustic (PA) cell for QEPAS on solid samples. Periodic heating of the sample is excited by modulated light from an interband cascade laser (ICL) in the infrared region. The cell represents a half-open cylinder that exhibits an acoustical resonance frequency equal to that of the QTF and, therefore, additionally amplifies the PA signal. The antinode of the sound pressure of the first longitudinal overtone can be accessed by the sound detector. A 3D finite element (FE) simulation confirms the optimal dimensions of the new cylindrical cell with the given QTF resonance frequency. An experimental verification is performed with an ultrasound micro-electromechanical system (MEMS) microphone. The presented frequency-dependent QEPAS measurement exhibits a low noise signal with a high-quality factor. The QEPAS-based investigation of three different solid synthetics resulted in a linearly dependent signal with respect to the absorption.

Miniaturized capacitive microphones often show sensitivity degradation in the low-frequency region due to electrical and acoustical time constants. For low-frequency sound detection, conventional systems use a microphone with a large diaphragm and a large back chamber to increase the time constant. In order to overcome this limitation, an electret gate on a field-effect transistor (ElGoFET) structure was proposed, which is the field-effect transistor (FET) mounted diaphragm faced on electret. The use of the sensing mechanism consisting of the integrated FET and electret enables the direct detection of diaphragm displacement, which leads its acoustic senor application (ElGoFET microphone) and has a strong ability to detect low-frequency sound. We studied a theoretical model and design for low-frequency operation of the ElGoFET microphone prototype. Experimental investigations pertaining to the design, fabrication, and acoustic measurement of the microphone were performed and the results were compared to our analytical predictions. The feasibility of the microphone as a low-frequency micro-electromechanical system (MEMS) microphone, without the need for a direct current bias voltage (which is of particular interest for applications requiring miniaturized components), was demonstrated by the flat-band frequency response in the low-frequency region.

Sound source localization is a well-researched subject with applications ranging from localizing sniper fire in urban battlefields to cataloging wildlife in rural areas. One critical application is the localization of noise pollution sources in urban environments, due to an increasing body of evidence linking noise pollution to adverse effects on human health. Current noise mapping techniques often fail to accurately identify noise pollution sources, because they rely on the interpolation of a limited number of scattered sound sensors. Aiming to produce accurate noise pollution maps, we developed the SoundCompass, a low-cost sound sensor capable of measuring local noise levels and sound field directionality. Our first prototype is composed of a sensor array of 52 Microelectromechanical systems (MEMS) microphones, an inertial measuring unit and a low-power field-programmable gate array (FPGA). This article presents the SoundCompass’s hardware and firmware design together with a data fusion technique that exploits the sensing capabilities of the SoundCompass in a wireless sensor network to localize noise pollution sources. Live tests produced a sound source localization accuracy of a few centimeters in a 25-m2 anechoic chamber, while simulation results accurately located up to five broadband sound sources in a 10,000-m2 open field.

A photoacoustic sensor system (PAS) intended for carbon dioxide (CO2) blood gas detection is presented. The development focuses on a photoacoustic (PA) sensor based on the so-called two-chamber principle, i.e., comprising a measuring cell and a detection chamber. The aim is the reliable continuous monitoring of transcutaneous CO2 values, which is very important, for example, in intensive care unit patient monitoring. An infrared light-emitting diode (LED) with an emission peak wavelength at 4.3 µm was used as a light source. A micro-electro-mechanical system (MEMS) microphone and the target gas CO2 are inside a hermetically sealed detection chamber for selective target gas detection. Based on conducted simulations and measurement results in a laboratory setup, a miniaturized PA CO2 sensor with an absorption path length of 2.0 mm and a diameter of 3.0 mm was developed for the investigation of cross-sensitivities, detection limit, and signal stability and was compared to a commercial infrared CO2 sensor with a similar measurement range. The achieved detection limit of the presented PA CO2 sensor during laboratory tests is 1 vol. % CO2. Compared to the commercial sensor, our PA sensor showed less influences of humidity and oxygen on the detected signal and a faster response and recovery time. Finally, the developed sensor system was fixed to the skin of a test person, and an arterialization time of 181 min could be determined.

Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on” applications increasingly requires a low power consumption. In this paper, we show a new readout circuit approach which is based on a mostly digital Sigma Delta ( Σ Δ ) analog-to-digital converter (ADC). The operating principle of the readout circuit consists of coupling the MEMS sensor to an impedance converter that modulates the frequency of a stacked-ring oscillator—a new voltage-controlled oscillator (VCO) circuit featuring a good trade-off between phase noise and power consumption. The frequency coded signal is then sampled and converted into a noise-shaped digital sequence by a time-to-digital converter (TDC). A time-efficient design methodology has been used to optimize the sensitivity of the oscillator combined with the phase noise induced by 1 / f and thermal noise. The circuit has been prototyped in a 130 nm CMOS process and directly bonded to a standard MEMS microphone. The proposed VCO-based analog-to-digital converter (VCO-ADC) has been characterized electrically and acoustically. The peak signal-to-noise and distortion ratio (SNDR) obtained from measurements is 77.9 dB-A and the dynamic range (DR) is 100 dB-A. The current consumption is 750 μ A at 1.8 V and the effective area is 0.12 mm 2 . This new readout circuit may represent an enabling advance for low-cost digital MEMS microphones.

Can ordinary Micro-Electro-Mechanical-Systems (MEMS) microphones be used for near-ultrasonic applications? Manufacturers often provide little information about the signal-to-noise ratio (SNR) in the ultrasound (US) range and, if they do, the data are often determined in a manufacturer-specific manner and are generally not comparable. Here, four different air-based microphones from three different manufacturers are compared with respect to their transfer functions and noise floor. The deconvolution of an exponential sweep and a traditional calculation of the SNR are used. The equipment and methods used are specified, which makes it easy to repeat or expand the investigation. The SNR of MEMS microphones in the near US range is mainly affected by resonance effects. These can be matched for applications with low-level signals and background noise such that the highest possible SNR can be achieved. Two MEMS microphones from Knowles performed best for the frequency range from 20 to 70 kHz; above 70 kHz, an Infineon model delivered the best performance.

Micro-electromechanical system (MEMS)-based acoustic transducers are also known as microphones. The membrane materials on MEMS microphones are metal, polysilicon, silicon, and silicon nitride. The existing technology and materials used for the microphones involve expensive materials and complex process steps. This paper proposed a low-cost fabrication process and studies a MEMS acoustic transducer device using polyimide as a membrane on FR4 substrate (non-silicon substrate). The numerical simulation is carried out for the proposed device and considers the following parameters such as thickness of membrane, diameter of diaphragm cavity, resistor length and applied pressure. This device has four resistors which are linked in the method of Wheatstone bridge. The resistance change is observed due to membrane deformation when applying pressure, and output is measured on corresponding nodes. Based on the operating parameters studied the change in resistance, displacement, frequency response, sensitivity and operating bandwidth.