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Humidity sensors are of significance in various fields, such as environmental and food quality monitoring, industrial processing, wearable and flexible electronics, and human health care. High-performance humidity sensors with high sensitivity, rapid response time, and good stability are of paramount importance in humidity sensing. In this paper, diversiform humidity sensors with different sensing mechanisms are summarized, including resistive, impedance, capacitive, quartz crystal microbalance (QCM), surface acoustic wave (SAW), field-effect transistor (FET), and optical fiber humidity sensors. Versatile nanomaterials such as graphene, transition-metal chalcogenide, MXenes, black phosphorus (BP), boron nitride (BN), polymers, and nanofibers were promising building-blocks for constructing humidity sensors. The latest progress in the wearable and flexible humidity sensors, and self-powered humidity sensors was summarized. The diversiform applications of the humidity sensors with great prospects were demonstrated in various fields in terms of human respiratory monitoring, skin dryness diagnosing, fingertip approaching, and non-contact switch. Moreover, the challenges and prospects of nanomaterials-based humidity sensors were discussed.

A novel capacitive humidity sensor based on carbon black/polyimide composites is presented in this paper. The details of the fabrication, sensor characteristics, and effect of the carbon black additive are described. It was confirmed that the polyimide composite filled with a tiny amount of carbon black was suitable for a humidity sensing dielectric. The humidity sensors with three different dielectrics, which were pure polyimide, 0.01 wt% carbon black/polyimide, and 0.05 wt% carbon black/polyimide, were fabricated by a micro-electro-mechanical-system (MEMS) process. As the amount of the carbon black additive increased, the sensitivity of the humidity sensor increased. The humidity sensor with 0.05 wt% of carbon black had a much higher sensitivity of 15.21% (20–80% RH, 0.2535%/% RH) than that of the sensor with pure polyimide, which was 9.73% (0.1622%/% RH). The addition of carbon black also led to an enhancement in the hysteresis and response speed. The hysteresis of the humidity sensor decreased from 2.17 to 1.80% when increasing the amount of the carbon black additive. The response speed of the humidity sensor with 0.05 wt% of carbon black was measured to be ~10% faster than that of the sensor with pure polyimide. The long-term stability of the humidity sensors was demonstrated as well.

Humidity measurement is required in various fields. We previously developed a sensor that leverages the sudden change in the transmitted light intensity when switching from leakage mode to waveguide mode. By adjusting the low-refractive-index polymer of the cladding, we achieved measurements at 60% RH. However, for practical use, measurements at low humidity are essential. Therefore, in this study, we developed a sensor using a leakage mode that enables measurements at low humidity. To measure the leakage mode, it is necessary to increase the absorbance of the cladding and the incident angle at the core–cladding interface. Therefore, we developed a sensor in which the core was stretched, and the cladding was doped with a high concentration of dye. The experimental results confirmed that a sensor with a polymer concentration of 4% and a dye concentration of 3% could measure from 0% RH to 95% RH. The sensitivity was 0.1 dB/% RH from 0% RH to 70% RH and 0.32 dB/% RH from 70% RH to 95% RH. The estimated response time for a change from 10% to 90% light transmission for a sensor with 4% polymer concentration and 0.5% dye concentration was 22 s from 45% RH to 0% RH and 50 s from 0% RH to 45% RH.

An integrated humidity sensor capable of passive wireless sensing through inductive coupling is presented. The sensor chip consists of two stacked counter-rotating planar aluminium inductors (0.5 μm thick, 100 μm in width, 50 μm space and 6 mm outer diameter) separated by a maskless polyimide film. The two inductors are inductively and capacitively coupled together to form a resonant tank, whose resonant frequency changes with humidity. This topology eliminates the need of a connection bridge or via as used in the usual inductor–capacitor humidity sensors and offers higher sensitivity due to the inner humidity-sensitive parallel-plate capacitor in contrast with the single-layer self-resonant inductor. Three sensor devices with different inductor turns were fabricated and characterised. Measurements show a sensitivity of 45 kHz/%RH with a centre frequency of 50.5 MHz for sensor A (8 turns), 15.8 kHz/%RH, 22 MHz for sensor B (10 turns) and 65 kHz/%RH, 74 MHz for sensor C (4 turns).

This article addresses reliability under the sweat of interconnection techniques for the mounting surface mounted device (SMD) components and fully printed humidity sensors onto conductive stretchable textile ribbons. Samples underwent testing for the effect of ageing by artificial sweat on their electrical resistance using both alkaline and acidic artificial sweat. The best results in terms of electrical resistance change were obtained for samples soldered to the conductive fibers interwoven in the ribbon. However, this method can damage the ribbon due to the high temperature during soldering and significantly reduce the mechanical properties and flexibility of the ribbon, which can lead to a limited service life of samples. On the other hand, adhesive bonding is a very interesting alternative, where the above-mentioned properties are preserved, but there is a significant effect of sweat ageing on electrical resistance. The results of fully printed graphene-based humidity sensors show that, for the intended use of these sensors (i.e., detection of changes in moisture on the human body), usage of the samples is possible, and the samples are sufficiently reliable in the case of sweat degradation. In addition, the response of the sensor to humidity is quite high: 98% at a relative humidity of 98%.

TiO2 nanoparticles coating has been proven to be an extremely performing sensing material for relative humidity (RH) measurements. The chemical activity of TiO2 toward water vapor adsorption and the very large surface to volume ratio typical of nanostructures are ideal characteristics for the development of RH fast and sensitive sensors. Different sensor technologies can be used in conjunction with this material to realize devices with satisfactory performance. In this paper, the authors aim to describe and discuss the main different possible choices and highlight the advantages and disadvantages, and linking them both to the underlying mechanism of water adsorption on the TiO2 sensing layer and to the modification of the electrical behavior due to the water adsorption. In particular, the authors start from results obtained by depositing TiO2 nanoparticles on a novel MEMS microbalance operating at low frequency, which allows to sense only the adsorbed water mass, and they exploit the sensor output to obtain a dynamic model of the water adsorption. They also link these results to those obtained with a Quartz Crystal Microbalance (QCM) functionalized with the same material operating at 10 MHz as a part of an oscillator. Finally, they establish a link with the results obtained by an RH impedance sensor, which exploits the same active material and the same deposition technique. With this sensor technology, the conductive and electrical behavior of the sensing and adsorbed films play a role. The whole work tries to unravel the different phenomena that contribute to the response of RH sensors not only based on TiO2 nanoparticles but also, more generally, based on nanostructured metal oxide materials.

This study synthesized pristine and aluminum (Al)-doped zinc oxide (Al:ZnO) nanostructures through a simplistic low-temperature ultrasonicated solution immersion method. Al:ZnO nanostructures were synthesized as a sensing material using different immersion times varying from two to five hours. The Al:ZnO nanostructured-based flexible humidity sensor was fabricated by employing cellulose filter paper as a substrate and transparent paper glue as a binder through a simplistic brush printing technique. XRD, FESEM, HRTEM, EDS, XPS, a two-probe I–V measurement system, and a humidity measurement system were employed to investigate the structural, morphological, chemical, electrical, and humidity-sensing properties of the pristine ZnO and Al:ZnO nanostructures. The structural and morphological analysis confirmed that Al cations successfully occupied the Zn lattice or integrated into interstitial sites of the ZnO lattice matrix. Humidity-sensing performance analysis indicated that the resistance of the Al:ZnO nanostructure samples decreased almost linearly as the humidity level increased, leading to better sensitivity and sensing response. The Al:ZnO-4 h nanostructured-based flexible humidity sensor had a maximum sensing response and demonstrated the highest sensitivity towards humidity changes, which was noticeably superior to the other tested samples. Finally, this study explained the Al:ZnO nanostructures-based flexible humidity sensor sensing mechanism in terms of chemical adsorption, physical adsorption, and capillary condensation mechanisms.

In a wide range of applications such as healthcare treatment, environmental monitoring, food processing and storage, and semiconductor chip manufacturing, relative humidity (RH) sensing is required. However, traditional fiber-optic humidity sensors face the challenges of miniaturization and indirectly obtaining humidity values. Here, we propose and demonstrate an optical barcode technique by cooperating with RH meta-tip, which can predict the humidity values directly. Such RH meta-tip is composed of fiber-optic sensor based on surface plasmon resonance (SPR) effect and graphene oxide film as humidity sensitizer. While SPR sensor is composed of multimode fiber (MMF) integrated with metallic metasurface. Dynamic time warping (DTW) algorithm is used to obtain the warp path distance (WPD) sequence between the measured reflection spectrum and the spectra of the precalibrated database. The distance sequence is transformed into a pseudo-color barcode, and the humidity value is corresponded to the lowest distance, which can be read by human eyes. The RH measurement depends on the collective changes of the reflection spectrum rather than tracking a single specific resonance peak/dip. This work can open up new doors to the development of a humidity sensor with direct RH recognition by human eyes.

A humidity sensor is a crucial device in daily life; therefore, in the present study, a novel humidity sensor was designed to increase its specific surface area to improve its humid sensing capacity and conductivity. Titanium dioxide nanoparticles (TiNP) consisting of zero-dimensional nanospheres and one-dimensional nanotubes were prepared by anodic oxidation. Rod-shaped cellulose nanocrystals (CNCs) with average length and diameter of 60 nm and 800 nm, respectively, were obtained by enzymatic hydrolysis and high pressure homogenization. TiNP/CNC composite films exhibited superior hydrophilicity and large specific surface areas based on Fourier transform infrared spectroscopy and nitrogen adsorption–desorption results. The humidity sensing characteristics of sensors based on TiNP/CNC flexible composite films with varying contents of TiNP were investigated under a relative humidity range of 11–97%. The 6% TiNP/CNC-based humidity sensor exhibited high humidity response, rapid response/recovery speed, and high stability. Furthermore, the humidity sensing mechanism of TiNP/CNC composite films was analyzed based on the density functional theory. TiNP/CNC-based humidity sensors could be applied in flexible and wearable electronics.

Polymer-based capacitive humidity sensors emerged around 40 years ago; nevertheless, they currently constitute large part of sensors’ market within a range of medium (climatic and industrial) humidity 20−80%RH due to their linearity, stability and cost-effectiveness. However, for low humidity values (0−20%RH) that type of sensor exhibits increasingly nonlinear characteristics with decreasing of humidity values. This paper presents the results of some experimental trials of CMOS polymer-based capacitive humidity sensors, as well as of modelling the behaviour of that type of sensor. A logarithmic functional relationship between the relative humidity and the change of sensor output value at low humidity is suggested.