Journal Article

Application of phase extension method to sub-Å transmission electron microscopy

Yoo, Seung Jo, Shin, Jae Won, Lee, Sang-Gil, Lee, Seok-Hoon, Kim, Youn-Joong, Kim, Jin-Gyu

2012

Overview

A sub-Å resolution analysis of a Si crystal structure was performed successfully using a phase extension technique that combined the high-voltage electron microscopy (HVEM) and energy-filtered precession electron diffraction (EF-PED) methods. The high resolution electron microscopy (HREM) image of Si [211] was obtained with a spatial resolution of 0.12 nm using HVEM. The electron diffraction of Si [211] was acquired with a spatial resolution of 0.06 nm by employing the EF-PED method. The phase information of Si [211] was extracted from a deconvoluted image by applying instrumental parameters. Its amplitude information with higher spatial resolution was quasi-kinematically extracted from EF-PED data. Finally, it was revealed that Si atoms were clearly separated with a resolution of 0.78 Å in the enhanced resolution image. Therefore, it is expected that the combination of the HVEM and EF-PED methods will be a useful and powerful tool for the quantitative characterization of nanostructured materials.

• Publisher: Springer Netherlands,Springer Nature B.V,대한금속·재료학회
• Subject: Characterization and Evaluation of Materials / Chemistry and Materials Science / Engineering Thermodynamics / Heat and Mass Transfer / Machines / Magnetic Materials / Magnetism / Manufacturing / Materials Science / Metallic Materials / Processes / Solid Mechanics / 재료공학