Journal Article

MEMS-based gas flow sensors

Chang, Chih-Ming, Lin, Che-Hsin, Fu, Lung-Ming, Lee, Chia-Yen, Wang, Yu-Hsiang, Chen, Chang-Pen, Lin, Chia-Pin

2009

Overview

Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements, sensors, actuators, and electronics on a single silicon substrate in order to accomplish a multitude of different tasks in a diverse range of fields. The potential for device miniaturization made possible by MEMS micro-fabrication techniques has facilitated the development of many new applications, such as highly compact, non-invasive pressure sensors, accelerometers, gas sensors, etc. Besides their small physical footprint, such devices possess many other advantages compared to their macro-scale counterparts, including greater precision, lower power consumption, more rapid response, and the potential for low-cost batch production. One area in which MEMS technology has attracted particular attention is that of flow measurement. Broadly speaking, existing micro-flow sensors can be categorized as either thermal or non-thermal, depending upon their mode of operation. This paper commences by providing a high level overview of the MEMS field and then describes some of the fundamental thermal and non-thermal micro-flow sensors presented in the literature over the past 30 years or so.

• Publisher: Springer-Verlag,Springer Nature B.V
• Subject: Accelerometers / Analytical Chemistry / Biomedical Engineering and Bioengineering / Engineering / Engineering Fluid Dynamics / Fabrication / Flow measurement / Nanotechnology and Microengineering / Power consumption / Pressure sensors / Review / Sensors