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Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon Carbide Ceramics
by
Zhou, Yan
, Xu, Zisu
, Lin, Jieqiong
, Kang, Mingshuo
, Lu, Hao
, Gu, Yan
, Yi, Allen
in
Brittle materials
/ Brittleness
/ Ceramics
/ Crack initiation
/ Ductile-brittle transition
/ Experiments
/ Finite element method
/ Grain size
/ Machine tools
/ Mathematical models
/ Parameters
/ Polishes
/ Polishing
/ Service life
/ Silicon carbide
/ Silicon nitride
/ Surface properties
/ Surface roughness
/ Vibration
/ Workpieces
2019
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Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon Carbide Ceramics
by
Zhou, Yan
, Xu, Zisu
, Lin, Jieqiong
, Kang, Mingshuo
, Lu, Hao
, Gu, Yan
, Yi, Allen
in
Brittle materials
/ Brittleness
/ Ceramics
/ Crack initiation
/ Ductile-brittle transition
/ Experiments
/ Finite element method
/ Grain size
/ Machine tools
/ Mathematical models
/ Parameters
/ Polishes
/ Polishing
/ Service life
/ Silicon carbide
/ Silicon nitride
/ Surface properties
/ Surface roughness
/ Vibration
/ Workpieces
2019
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Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon Carbide Ceramics
by
Zhou, Yan
, Xu, Zisu
, Lin, Jieqiong
, Kang, Mingshuo
, Lu, Hao
, Gu, Yan
, Yi, Allen
in
Brittle materials
/ Brittleness
/ Ceramics
/ Crack initiation
/ Ductile-brittle transition
/ Experiments
/ Finite element method
/ Grain size
/ Machine tools
/ Mathematical models
/ Parameters
/ Polishes
/ Polishing
/ Service life
/ Silicon carbide
/ Silicon nitride
/ Surface properties
/ Surface roughness
/ Vibration
/ Workpieces
2019
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Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon Carbide Ceramics
Journal Article
Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon Carbide Ceramics
2019
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Overview
Subsurface damages and surface roughness are two significant parameters which determine the performance of silicon carbide (SiC) ceramics. Subsurface damages (SSD) induced by conventional polishing could seriously affect the service life of the workpiece. To address this problem, vibration-assisted polishing (VAP) was developed to machine hard and brittle materials, because the vibration-assisted machine (VAM) can increase the critical cutting depth to improve the surface integrity of materials. In this paper, a two-dimensional (2D) VAM system is used to polish SiC ceramics. Moreover, a theoretical SSD model is constructed to predict the SSD. Furthermore, finite element simulation (FEM) is adopted to analyze the effects of different VAP parameters on SSD. Finally, a series of scratches and VAP experiments are conducted on the independent precision polishing machine to investigate the effects of polishing parameters on brittle–ductile transition and SSD.
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