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Hole-doping-assisted epitaxial growth of wafer-scale rhombohedral-stacked bilayer transition-metal dichalcogenides single crystals
by
Peng, Yanan
, Jiang, Yulin
, Li, Yuhang
, Li, Xiaohui
, Huang, Ling
, He, Jun
, Du, Zhu
, Shi, Jianping
, Han, Ziyi
, Xu, Nan
, Xu, Ruihan
, Xia, Congxin
, Wan, Qiang
, Sun, Hang
, Song, Luying
, Li, Yinuo
, Zhao, Xiaoxu
, Liao, Lei
in
140/133
/ 140/146
/ 147/137
/ 147/143
/ 147/3
/ 639/766/119/996
/ 639/925/357/1018
/ 639/925/357/551
/ Annealing
/ Bilayers
/ Carrier mobility
/ Chalcogenides
/ Chemical vapor deposition
/ Chips (memory devices)
/ Contact angle
/ Crystal defects
/ Crystals
/ Doping
/ Epitaxial growth
/ Ferroelectric materials
/ Ferroelectricity
/ Field effect transistors
/ Free energy
/ Grain orientation
/ Hafnium
/ Heat of formation
/ Humanities and Social Sciences
/ Interlayers
/ Microscopy
/ Molybdenum disulfide
/ multidisciplinary
/ Nucleation
/ Retention time
/ Sapphire
/ Science
/ Science (multidisciplinary)
/ Semiconductor devices
/ Single crystals
/ Solid phases
/ Synthesis
/ Transition metal compounds
2025
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Hole-doping-assisted epitaxial growth of wafer-scale rhombohedral-stacked bilayer transition-metal dichalcogenides single crystals
by
Peng, Yanan
, Jiang, Yulin
, Li, Yuhang
, Li, Xiaohui
, Huang, Ling
, He, Jun
, Du, Zhu
, Shi, Jianping
, Han, Ziyi
, Xu, Nan
, Xu, Ruihan
, Xia, Congxin
, Wan, Qiang
, Sun, Hang
, Song, Luying
, Li, Yinuo
, Zhao, Xiaoxu
, Liao, Lei
in
140/133
/ 140/146
/ 147/137
/ 147/143
/ 147/3
/ 639/766/119/996
/ 639/925/357/1018
/ 639/925/357/551
/ Annealing
/ Bilayers
/ Carrier mobility
/ Chalcogenides
/ Chemical vapor deposition
/ Chips (memory devices)
/ Contact angle
/ Crystal defects
/ Crystals
/ Doping
/ Epitaxial growth
/ Ferroelectric materials
/ Ferroelectricity
/ Field effect transistors
/ Free energy
/ Grain orientation
/ Hafnium
/ Heat of formation
/ Humanities and Social Sciences
/ Interlayers
/ Microscopy
/ Molybdenum disulfide
/ multidisciplinary
/ Nucleation
/ Retention time
/ Sapphire
/ Science
/ Science (multidisciplinary)
/ Semiconductor devices
/ Single crystals
/ Solid phases
/ Synthesis
/ Transition metal compounds
2025
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Hole-doping-assisted epitaxial growth of wafer-scale rhombohedral-stacked bilayer transition-metal dichalcogenides single crystals
by
Peng, Yanan
, Jiang, Yulin
, Li, Yuhang
, Li, Xiaohui
, Huang, Ling
, He, Jun
, Du, Zhu
, Shi, Jianping
, Han, Ziyi
, Xu, Nan
, Xu, Ruihan
, Xia, Congxin
, Wan, Qiang
, Sun, Hang
, Song, Luying
, Li, Yinuo
, Zhao, Xiaoxu
, Liao, Lei
in
140/133
/ 140/146
/ 147/137
/ 147/143
/ 147/3
/ 639/766/119/996
/ 639/925/357/1018
/ 639/925/357/551
/ Annealing
/ Bilayers
/ Carrier mobility
/ Chalcogenides
/ Chemical vapor deposition
/ Chips (memory devices)
/ Contact angle
/ Crystal defects
/ Crystals
/ Doping
/ Epitaxial growth
/ Ferroelectric materials
/ Ferroelectricity
/ Field effect transistors
/ Free energy
/ Grain orientation
/ Hafnium
/ Heat of formation
/ Humanities and Social Sciences
/ Interlayers
/ Microscopy
/ Molybdenum disulfide
/ multidisciplinary
/ Nucleation
/ Retention time
/ Sapphire
/ Science
/ Science (multidisciplinary)
/ Semiconductor devices
/ Single crystals
/ Solid phases
/ Synthesis
/ Transition metal compounds
2025
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Hole-doping-assisted epitaxial growth of wafer-scale rhombohedral-stacked bilayer transition-metal dichalcogenides single crystals
Journal Article
Hole-doping-assisted epitaxial growth of wafer-scale rhombohedral-stacked bilayer transition-metal dichalcogenides single crystals
2025
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Overview
Bilayer rhombohedral-stacked transition-metal dichalcogenides (3R-TMDCs) combining high carrier mobility, good electrostatic control, and exotic switchable polarization are emerging as promising semiconducting channels for beyond-silicon electronics. However, despite great efforts, the growth of wafer-scale bilayer 3R-TMDCs single crystals remains difficult due to challenges in the synergistic control of phase structure and grain orientation. Here we design a hole-doping-assisted strategy to synthesize a series of two-inch bilayer 3R-TMDCs single crystals on c-plane sapphire. The introduction of hole dopants (e.g. Hf, V, Nb, Ta) not only increases the interlayer coupling to break the formation energy degeneracy of bilayer 3R-stacked and hexagonal-stacked TMDCs, but also promotes the parallel steps formation on sapphire surfaces to induce the unidirectionally aligned bilayer grain nucleation. The fabricated ferroelectric semiconductor field-effect transistors based on bilayer Hf-MoS
2
demonstrate high endurance (more than 10
5
cycles) and long retention time (exceeding one year) due to the restriction of interlayer charge defect migration/aggregation caused by sliding ferroelectricity. This work proposes a promising strategy for synthesizing wafer-scale ferroelectric semiconductor single crystals, which could promote the further exploration of logic-in-memory chips.
2D rhombohedral-stacked transition metal dichalcogenides (3R-TMDs) combine high carrier mobility and ferroelectricity, but their large-scale synthesis remains challenging. Here, the authors report a hole-doping-assisted strategy to synthesize various wafer-scale bilayer 3R-TMD single crystals, showing the realization of high-performance ferroelectric transistors.
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