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Effect of focusing flow on stationary spot machining properties in elastic emission machining
by
Mimura, Hidekazu
, Takei, Yoshinori
in
Chemistry and Materials Science
/ Emissions
/ Fifth International Symposium on Atomically Controlled Fabrication Technology (ISACFT2012)
/ Materials Science
/ Molecular Medicine
/ Nano Express
/ Nanochemistry
/ Nanoscale Science and Technology
/ Nanotechnology
/ Nanotechnology and Microengineering
/ The Fifth International Symposium on Atomically Controlled Fabrication Technology
2013
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Effect of focusing flow on stationary spot machining properties in elastic emission machining
by
Mimura, Hidekazu
, Takei, Yoshinori
in
Chemistry and Materials Science
/ Emissions
/ Fifth International Symposium on Atomically Controlled Fabrication Technology (ISACFT2012)
/ Materials Science
/ Molecular Medicine
/ Nano Express
/ Nanochemistry
/ Nanoscale Science and Technology
/ Nanotechnology
/ Nanotechnology and Microengineering
/ The Fifth International Symposium on Atomically Controlled Fabrication Technology
2013
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Do you wish to request the book?
Effect of focusing flow on stationary spot machining properties in elastic emission machining
by
Mimura, Hidekazu
, Takei, Yoshinori
in
Chemistry and Materials Science
/ Emissions
/ Fifth International Symposium on Atomically Controlled Fabrication Technology (ISACFT2012)
/ Materials Science
/ Molecular Medicine
/ Nano Express
/ Nanochemistry
/ Nanoscale Science and Technology
/ Nanotechnology
/ Nanotechnology and Microengineering
/ The Fifth International Symposium on Atomically Controlled Fabrication Technology
2013
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Effect of focusing flow on stationary spot machining properties in elastic emission machining
Journal Article
Effect of focusing flow on stationary spot machining properties in elastic emission machining
2013
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Overview
Ultraprecise optical elements are applied in advanced optical apparatus. Elastic emission machining (EEM) is one of the ultraprecision machining methods used to fabricate shapes with 0.1-nm accuracy. In this study, we proposed and experimentally tested the control of the shape of a stationary spot profile by introducing a focusing-flow state between the nozzle outlet and the workpiece surface in EEM. The simulation results indicate that the focusing-flow nozzle sharpens the distribution of the velocity on the workpiece surface. The results of machining experiments verified those of the simulation. The obtained stationary spot conditions will be useful for surface processing with a high spatial resolution.
Publisher
Springer New York,Springer Nature B.V,Springer
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