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Research on temperature characteristic of thermoelectric microwave power sensors based on GaAs MMIC technology
by
Liao, Xiaoping
, Wang, De-Bo
in
Applied sciences
/ Circuit properties
/ Coefficients
/ Electric, optical and optoelectronic circuits
/ Electronics
/ Exact sciences and technology
/ GaAs
/ Gallium arsenide
/ Gallium arsenides
/ III‐V semiconductors
/ MEMS technology
/ Microelectromechanical systems
/ microsensors
/ Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
/ microwave measurement
/ microwave power measurement
/ Microwave technology
/ Microwaves
/ MMIC
/ MMIC (circuits)
/ MMIC technology
/ power measurement
/ Power measurements
/ Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
/ Sensors
/ temperature characteristic
/ temperature coefficient
/ temperature sensors
/ thermoelectric microwave power sensor
/ Thermoelectric, pyroelectric devices, etc
/ Thermoelectricity
/ thermopiles
2013
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Research on temperature characteristic of thermoelectric microwave power sensors based on GaAs MMIC technology
by
Liao, Xiaoping
, Wang, De-Bo
in
Applied sciences
/ Circuit properties
/ Coefficients
/ Electric, optical and optoelectronic circuits
/ Electronics
/ Exact sciences and technology
/ GaAs
/ Gallium arsenide
/ Gallium arsenides
/ III‐V semiconductors
/ MEMS technology
/ Microelectromechanical systems
/ microsensors
/ Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
/ microwave measurement
/ microwave power measurement
/ Microwave technology
/ Microwaves
/ MMIC
/ MMIC (circuits)
/ MMIC technology
/ power measurement
/ Power measurements
/ Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
/ Sensors
/ temperature characteristic
/ temperature coefficient
/ temperature sensors
/ thermoelectric microwave power sensor
/ Thermoelectric, pyroelectric devices, etc
/ Thermoelectricity
/ thermopiles
2013
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Research on temperature characteristic of thermoelectric microwave power sensors based on GaAs MMIC technology
by
Liao, Xiaoping
, Wang, De-Bo
in
Applied sciences
/ Circuit properties
/ Coefficients
/ Electric, optical and optoelectronic circuits
/ Electronics
/ Exact sciences and technology
/ GaAs
/ Gallium arsenide
/ Gallium arsenides
/ III‐V semiconductors
/ MEMS technology
/ Microelectromechanical systems
/ microsensors
/ Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
/ microwave measurement
/ microwave power measurement
/ Microwave technology
/ Microwaves
/ MMIC
/ MMIC (circuits)
/ MMIC technology
/ power measurement
/ Power measurements
/ Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
/ Sensors
/ temperature characteristic
/ temperature coefficient
/ temperature sensors
/ thermoelectric microwave power sensor
/ Thermoelectric, pyroelectric devices, etc
/ Thermoelectricity
/ thermopiles
2013
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Research on temperature characteristic of thermoelectric microwave power sensors based on GaAs MMIC technology
Journal Article
Research on temperature characteristic of thermoelectric microwave power sensors based on GaAs MMIC technology
2013
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Overview
The effect of temperature on thermoelectric microwave power sensors is researched in order to extend its application field. The fabrication of this microwave power sensor is divided into a front side and a back side processing using GaAs MMIC process and MEMS technology. The measurement results show that the temperature has a significant effect on the performance of thermoelectric microwave power sensors. The obtained temperature coefficient is about 0.488 mV/(W · K), which has an important reference value for the thermoelectric microwave power sensors. The reason is that the accuracy of microwave power measurement will be realised as long as the environment temperature is tracked.
Publisher
The Institution of Engineering and Technology,Institution of Engineering and Technology,John Wiley & Sons, Inc
Subject
/ Electric, optical and optoelectronic circuits
/ Exact sciences and technology
/ GaAs
/ Microelectromechanical systems
/ MMIC
/ Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
/ Sensors
/ thermoelectric microwave power sensor
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