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Improved Subthreshold Characteristics by Back-Gate Coupling on Ferroelectric ETSOI FETs
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Improved Subthreshold Characteristics by Back-Gate Coupling on Ferroelectric ETSOI FETs
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Journal Article
Improved Subthreshold Characteristics by Back-Gate Coupling on Ferroelectric ETSOI FETs
2022
Overview
In this work, extremely thin silicon-on-insulator field effective transistors (ETSOI FETs) are fabricated with an ultra-thin 3 nm ferroelectric (FE) hafnium zirconium oxides (Hf0.5Zr0.5O2) layer. Furthermore, the subthreshold characteristics of the devices with double gate modulation are investigated extensively. Contributing to the advantages of the back-gate voltage coupling effects, the minimum subthreshold swing (SS) value of a 40 nm ETSOI device could be adjusted from the initial 80.8–50 mV/dec, which shows ultra-steep SS characteristics. To illustrate this electrical character, a simple analytical model based on the transient Miller model is demonstrated. This work shows the feasibility of FE ETSOI FET for ultra-low-power applications with dynamic threshold adjustment.
Publisher
Springer Nature B.V
