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On Increasing the Sensitivity of a Resonator Probe with Axial Symmetry in Local Microwave Diagnostics of Nanoscale Objects
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On Increasing the Sensitivity of a Resonator Probe with Axial Symmetry in Local Microwave Diagnostics of Nanoscale Objects
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Journal Article
On Increasing the Sensitivity of a Resonator Probe with Axial Symmetry in Local Microwave Diagnostics of Nanoscale Objects
2025
Overview
The paper discusses the prospects for expanding the sensitivity range of local microwave sensors (resonator probes, RP) with axial symmetry in diagnostics of small-sized objects, including micro- and nanoelectronics objects. All the considered methods for increasing the sensitivity of RP with a coaxial measuring aperture (RPCMA) are based on changing the coefficient of inclusion of the analyzed object in the electromagnetic field of the resonator. Particular attention is paid to increasing the sensitivity of probes with a submicron tip size for studying objects with a resolution of the order of nanometers. Models of RP with different designs of the aperture region are presented. The results of a study of the influence of both the storage and aperture parts of the RP on the signals of measuring information in various probe designs are presented. It is shown that the achievable sensitivity in the probes is directly related to the volume of the storage part, which is due to a change in the unloaded Q-factor of the resonator. The results of a study of small-sized RPCMA are presented. The prospects of their use for diagnostics of objects with low dielectric losses are discussed.Quantitative data are presented that characterize the operation of a sensor based on a resonator with tunable sensitivity, which is ensured by shifting the tip of the probe relative to the aperture. Various operating modes of such a sensor are studied in detail. The results obtained indicate the presence of high losses in this design when diagnosing solid objects with low values of the dielectric parameters and tg. Also, very interesting results are presented from a study of the use of a sensor with tunable sensitivity for diagnostics of liquid or bulk objects with low dielectric parameters ɛ and tg.
Publisher
Sumy State University, Journal of Nano - and Electronic Physics
Subject
