Asset Details
Do you wish to reserve the book?
Investigation on high-aspect-ratio silicon carbide ceramic microchannel by using waterjet-assisted laser micromachining
Hey, we have placed the reservation for you!
By the way, why not check out events that you can attend while you pick your title.
Oops! Something went wrong.
Looks like we were not able to place the reservation. Kindly try again later.
Are you sure you want to remove the book from the shelf?
Investigation on high-aspect-ratio silicon carbide ceramic microchannel by using waterjet-assisted laser micromachining
Do you wish to request the book?
Investigation on high-aspect-ratio silicon carbide ceramic microchannel by using waterjet-assisted laser micromachining
Please be aware that the book you have requested cannot be checked out. If you would like to checkout this book, you can reserve another copy
We have requested the book for you!
Your request is successful and it will be processed during the Library working hours. Please check the status of your request in My Requests.
Oops! Something went wrong.
Looks like we were not able to place your request. Kindly try again later.
Journal Article
Investigation on high-aspect-ratio silicon carbide ceramic microchannel by using waterjet-assisted laser micromachining
2024
Overview
The challenging machinability of silicon carbide (SiC) ceramic, due to its hardness and brittleness, has traditionally constrained its machined quality and the creation of functional surfaces. Compared to direct laser machining (DLM), waterjet-assisted laser micromachining (WJALM) is an alternative technique for SiC ceramic that is capable of reducing thermal-induced damages. In this paper, high-aspect-ratio (HAR) microchannels are fabricated on silicon carbide ceramic by WJALM, and its effectiveness is verified through comparative experiments with DLM. The effects of the parametric combination of waterjet and laser parameters on machining responses of geometric structural features and sidewall surface quality are investigated by controlled variable experiments. The results revealed that HAR microchannels with almost no recast layers could be obtained when the SiC workpiece was fabricated by a nanosecond laser under the flowing water medium layer, and higher average laser power of 27 W, lower scanning speed of 600 m/s, and medium waterjet velocity of 12/16 m/s contributed to larger aspect ratio, more ablation area and superior sidewall quality of HAR microchannels.
Publisher
Springer Nature B.V
Subject
