Journal Article

Growth of nanoporous high-entropy oxide thin films by pulsed laser deposition

Guo, Huiming, Dupuy, Alexander D., Bowman, William J., Wang, Xin, Schoenung, Julie M.

2022

Overview

High-entropy oxides (HEO) with entropic stabilization and compositional flexibility have great potential application in batteries and catalysis. In this work, HEO thin films were synthesized by pulsed laser deposition (PLD) from a rock-salt (Co 0.2 Ni 0.2 Cu 0.2 Mg 0.2 Zn 0.2 )O ceramic target. The films exhibited the target’s crystal structure, were chemically homogeneous, and possessed a three-dimensional (3D) island morphology with connected randomly shaped nanopores. The effects of varying PLD laser fluence on crystal structure and morphology were explored systematically. Increasing fluence facilitates film crystallization at low substrate temperature (300 °C) and increases film thickness (60–140 nm). The lateral size of columnar grains, islands (19 nm to 35 nm in average size), and nanopores (9.3 nm to 20 nm in average size) increased with increasing fluence (3.4 to 7.0 J/cm 2 ), explained by increased kinetic energy of adatoms and competition between deposition and diffusion. Additionally, increasing fluence reduces the number of undesirable droplets observed on the film surface. The nanoporous HEO films can potentially serve as electrochemical reaction interfaces with tunable surface area and excellent phase stability. Graphical abstract

• Publisher: Springer International Publishing,Springer Nature B.V
• Subject: Adatoms / Applied and Technical Physics / Biomaterials / Chemistry and Materials Science / Crystal structure / Crystallization / Entropy / Film thickness / Fluence / Inorganic Chemistry / Interface stability / Kinetic energy / Lasers / Materials Engineering / Materials research / Materials Science / Morphology / Nanotechnology / Phase stability / Pulsed laser deposition / Pulsed lasers / Substrates / Surface stability / Thin films