Journal Article

High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

Santiago J. CartamiI-Bueno Peter G. Steeneken Frans D. Tichelaar Efren Navarro-Moratalla Warner J. Venstra Ronald van Leeuwen Eugenio Coronado Herre S.J. van der Zant Gary A. Steele Andres Castellanos-Gomez

2015

Overview

Controlling the strain in two-dimensional （2D） materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here, we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by the laser oxidation of nano-drumhead resonators composed of tantalum diselenide （TaSe2）, a layered 2D material belonging to the metal dichalcogenides. Before the study of their mechanical properties with a laser interferometer, we verified the oxidation and crystallinity of the freely suspended tantalum oxide using high-resolution electron microscopy. We demonstrate that the stress of tantalum oxide resonators increases by 140 MPa （with respect to pristine TaSe2 resonators）, which causes an enhancement in the quality factor （14 times larger） and resonance frequency （9 times larger） of these resonators.

• Publisher: Tsinghua University Press
• Subject: Atomic/Molecular Structure and Spectra / Biomedicine / Biotechnology / Chemistry and Materials Science / Condensed Matter Physics / Electron microscopy / factor / High resolution electron microscopy / interferometer,high / Lasers / Materials Science / Mechanical properties / Nanoelectromechanical systems / Nanotechnology / Oxidation / oxidation,optical / oxide,mechanical / Q factors / quality / Research Article / Resonators / resonators,laser / Tantalum / Tantalum oxides / TaSe2,tantalum