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Self-assembled photonic cavities with atomic-scale confinement
by
Stobbe, Søren
, Weis, Thor August Schimmell
, Tsoukalas, Konstantinos
, Arregui, Guillermo
, Babar, Ali Nawaz
, Kadkhodazadeh, Shima
, Vosoughi Lahijani, Babak
in
140/125
/ 142/126
/ 639/624/399/1022
/ 639/624/399/1098
/ 639/766/483/1139
/ 639/925/927/1021
/ Aspect ratio
/ Cavities
/ Confinement
/ Electron microscopes
/ Electron microscopy
/ Etching
/ Humanities and Social Sciences
/ Light diffraction
/ multidisciplinary
/ Scanning electron microscopy
/ Scanning transmission electron microscopy
/ Science
/ Science (multidisciplinary)
/ Self-assembly
/ Silicon
/ Surface stability
/ Transmission electron microscopy
2023
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Self-assembled photonic cavities with atomic-scale confinement
by
Stobbe, Søren
, Weis, Thor August Schimmell
, Tsoukalas, Konstantinos
, Arregui, Guillermo
, Babar, Ali Nawaz
, Kadkhodazadeh, Shima
, Vosoughi Lahijani, Babak
in
140/125
/ 142/126
/ 639/624/399/1022
/ 639/624/399/1098
/ 639/766/483/1139
/ 639/925/927/1021
/ Aspect ratio
/ Cavities
/ Confinement
/ Electron microscopes
/ Electron microscopy
/ Etching
/ Humanities and Social Sciences
/ Light diffraction
/ multidisciplinary
/ Scanning electron microscopy
/ Scanning transmission electron microscopy
/ Science
/ Science (multidisciplinary)
/ Self-assembly
/ Silicon
/ Surface stability
/ Transmission electron microscopy
2023
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Self-assembled photonic cavities with atomic-scale confinement
by
Stobbe, Søren
, Weis, Thor August Schimmell
, Tsoukalas, Konstantinos
, Arregui, Guillermo
, Babar, Ali Nawaz
, Kadkhodazadeh, Shima
, Vosoughi Lahijani, Babak
in
140/125
/ 142/126
/ 639/624/399/1022
/ 639/624/399/1098
/ 639/766/483/1139
/ 639/925/927/1021
/ Aspect ratio
/ Cavities
/ Confinement
/ Electron microscopes
/ Electron microscopy
/ Etching
/ Humanities and Social Sciences
/ Light diffraction
/ multidisciplinary
/ Scanning electron microscopy
/ Scanning transmission electron microscopy
/ Science
/ Science (multidisciplinary)
/ Self-assembly
/ Silicon
/ Surface stability
/ Transmission electron microscopy
2023
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Self-assembled photonic cavities with atomic-scale confinement
Journal Article
Self-assembled photonic cavities with atomic-scale confinement
2023
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Overview
Despite tremendous progress in research on self-assembled nanotechnological building blocks, such as macromolecules
1
, nanowires
2
and two-dimensional materials
3
, synthetic self-assembly methods that bridge the nanoscopic to macroscopic dimensions remain unscalable and inferior to biological self-assembly. By contrast, planar semiconductor technology has had an immense technological impact, owing to its inherent scalability, yet it seems unable to reach the atomic dimensions enabled by self-assembly. Here, we use surface forces, including Casimir–van der Waals interactions
4
, to deterministically self-assemble and self-align suspended silicon nanostructures with void features well below the length scales possible with conventional lithography and etching
5
, despite using only conventional lithography and etching. The method is remarkably robust and the threshold for self-assembly depends monotonically on all the governing parameters across thousands of measured devices. We illustrate the potential of these concepts by fabricating nanostructures that are impossible to make with any other known method: waveguide-coupled high-
Q
silicon photonic cavities
6
,
7
that confine telecom photons to 2 nm air gaps with an aspect ratio of 100, corresponding to mode volumes more than 100 times below the diffraction limit. Scanning transmission electron microscopy measurements confirm the ability to build devices with sub-nanometre dimensions. Our work constitutes the first steps towards a new generation of fabrication technology that combines the atomic dimensions enabled by self-assembly with the scalability of planar semiconductors.
Silicon photonic nanocavities based on surface forces and conventional lithography and etching are developed, demonstrating pioneering technology that integrates atomic dimensions with the scalability of planar semiconductors.
Publisher
Nature Publishing Group UK,Nature Publishing Group
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