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Sub-50 nm optical imaging in ambient air with 10× objective lens enabled by hyper-hemi-microsphere
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Sub-50 nm optical imaging in ambient air with 10× objective lens enabled by hyper-hemi-microsphere
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Journal Article
Sub-50 nm optical imaging in ambient air with 10× objective lens enabled by hyper-hemi-microsphere
2023
Overview
Optical microsphere nanoscope has great potential in the inspection of integrated circuit chips for semiconductor industry and morphological characterization in biology due to its superior resolving power and label-free characteristics. However, its resolution in ambient air is restricted by the magnification and numerical aperture (NA) of microsphere. High magnification objective lens is required to be coupled with microsphere for nano-imaging beyond the diffraction limit. To overcome these challenges, in this work, high refractive index hyper-hemi-microspheres with tunable magnification up to 10× are proposed and realized by accurately tailoring their thickness with focused ion beam (FIB) milling. The effective refractive index is put forward to guide the design of hyper-hemi-microspheres. Experiments demonstrate that the imaging resolution and contrast of a hyper-hemi-microsphere with a higher magnification and larger NA excel those of a microsphere in air. Besides, the hyper-hemi-microsphere could resolve ~50 nm feature with higher image fidelity and contrast compared with liquid immersed high refractive index microspheres. With a hyper-hemi-microsphere composed microscale compound lens configuration, sub-50 nm optical imaging in ambient air is realized by only coupling with a 10× objective lens (NA = 0.3), which enhances a conventional microscope imaging power about an order of magnitude.
The hyper-hemi-microsphere fabricated by FIB milling can resolve ~50 nm feature by only coupling with a 10× objective lens (NA = 0.3) in virtual imaging mode.
Publisher
Nature Publishing Group UK,Springer Nature B.V,Nature Publishing Group
