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Measurements of an Effective Longitudinal Coherence Length in Transmission Small Angle X-ray Scatterings
by
Chen, Guo-Dung
, Wu, Wen-Li
, Fu, Wei-En
, He, Bo-Ching
, Chang, Alice Chinghsuan
, Liu, Chun-Ting
in
Carbon
/ Coherence length
/ Coherent scattering
/ effective longitudinal coherence length
/ Experiments
/ integrated circuit
/ Laboratories
/ semiconductor devices
/ Sensors
/ Small angle X ray scattering
/ Transistors
/ transmission small-angle X-ray scattering
/ X-ray metrology
/ X-ray scattering
2020
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Measurements of an Effective Longitudinal Coherence Length in Transmission Small Angle X-ray Scatterings
by
Chen, Guo-Dung
, Wu, Wen-Li
, Fu, Wei-En
, He, Bo-Ching
, Chang, Alice Chinghsuan
, Liu, Chun-Ting
in
Carbon
/ Coherence length
/ Coherent scattering
/ effective longitudinal coherence length
/ Experiments
/ integrated circuit
/ Laboratories
/ semiconductor devices
/ Sensors
/ Small angle X ray scattering
/ Transistors
/ transmission small-angle X-ray scattering
/ X-ray metrology
/ X-ray scattering
2020
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While trying to remove the title from your shelf something went wrong :( Kindly try again later!
Do you wish to request the book?
Measurements of an Effective Longitudinal Coherence Length in Transmission Small Angle X-ray Scatterings
by
Chen, Guo-Dung
, Wu, Wen-Li
, Fu, Wei-En
, He, Bo-Ching
, Chang, Alice Chinghsuan
, Liu, Chun-Ting
in
Carbon
/ Coherence length
/ Coherent scattering
/ effective longitudinal coherence length
/ Experiments
/ integrated circuit
/ Laboratories
/ semiconductor devices
/ Sensors
/ Small angle X ray scattering
/ Transistors
/ transmission small-angle X-ray scattering
/ X-ray metrology
/ X-ray scattering
2020
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Measurements of an Effective Longitudinal Coherence Length in Transmission Small Angle X-ray Scatterings
Journal Article
Measurements of an Effective Longitudinal Coherence Length in Transmission Small Angle X-ray Scatterings
2020
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Overview
The notion of an effective longitudinal coherence length with its value much greater than λ2/(2Δλ) has been adopted in small-angle X-ray scattering communities for years, where λ and Δλ denote the incident wavelength and its spread, respectively. Often the implications of the effective longitudinal coherence length do not even enter considerations in the designing and data treatment of small-angle scattering experiments. In this work, conventional transmission small-angle X-ray scattering (tSAXS) was performed to reveal a clear angular dependence on effective longitudinal coherence length. The measured values of effective longitudinal coherence length can be as high as one millimeter, whereas the value of calculated λ2/(2Δλ) is in nanometers.
Publisher
MDPI AG,MDPI
Subject
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