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Ultrashort vertical-channel MoS2 transistor using a self-aligned contact
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Journal Article
Ultrashort vertical-channel MoS2 transistor using a self-aligned contact
2024
Overview
Two-dimensional (2D) semiconductors hold great promises for ultra-scaled transistors. In particular, the gate length of MoS
2
transistor has been scaled to 1 nm and 0.3 nm using single wall carbon nanotube and graphene, respectively. However, simultaneously scaling the channel length of these short-gate transistor is still challenging, and could be largely attributed to the processing difficulties to precisely align source-drain contact with gate electrode. Here, we report a self-alignment process for realizing ultra-scaled 2D transistors. By mechanically folding a graphene/BN/MoS
2
heterostructure, source-drain metals could be precisely aligned around the folded edge, and the channel length is only dictated by heterostructure thickness. Together, we could realize sub-1 nm gate length and sub-50 nm channel length for vertical MoS
2
transistor simultaneously. The self-aligned device exhibits on-off ratio over 10
5
and on-state current of 250 μA/μm at 4 V bias, which is over 40 times higher compared to control sample without self-alignment process.
The simultaneous scaling down of the channel length and gate length of 2D transistors remains challenging. Here, the authors report a self-alignment process to fabricate vertical MoS
2
transistors with sub-1 nm gate length and sub−50 nm channel length, exhibiting on-off ratios over 10
5
and on-state currents of 250 μA/μm at 4 V bias.
Publisher
Nature Publishing Group UK,Nature Publishing Group,Nature Portfolio
